ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells

Sittinger, V.; Ruske, F.; Werner, Wolfgang; Szyszka, Bernd; Rech, Bernd; Hüpkes, J.; Schöpe, G.; Stiebig, Helmut

doi:10.1016/j.tsf.2005.08.177

Cited by 86 publications

(34 citation statements)

References 14 publications

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“…The latter is crucial for indirect band gap absorbers in thin film cells (e.g. a-Si solar cells), to enhance the optical path length in the absorber and thus overall efficiency [9,10]. On an industrial basis it is produced mostly by magnetron sputtering, which is a relatively expensive vacuum technique [5,6].…”

Section: Introductionmentioning

confidence: 99%

Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis

2014

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In this contribution the effect of different deposition conditions on the physical properties of ZnO:Al grown by spray pyrolysis is outlined. In particular, it will be shown that the solvent composition affects the crystallographic orientation of the deposited films, as well as their roughness and electrical properties. Using water leads to higher resistive films than methanol. The choice of precursor salts also has an effect on the electrical properties, as using organic precursors leads to lower resistivity films. In both cases post annealing helps to reduce the overall resistivity of the films. The reduction in resistivity will change depending on the initial deposition condition of the films, with lower values observed for films deposited at lower temperature. In optimum conditions a resistivity of 7×10 -3 cm can be reproducibly achieved with inexpensive air blast nozzles at atmospheric pressure.

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Section: Introductionmentioning

confidence: 99%

Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis

2014

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“…2,3 Employing different absorber materials in multi-junction solar cells, such as amorphous silicon alloys and microcrystalline silicon, efficient light trapping is required at long wavelengths ͑up to 1100 nm͒. To meet this demand, TCO substrates with different surface textures have recently been developed and tested in solar cells, such as optimized wet-etched 4 or surface plasma-treated 5 zinc-oxide, double-textured tin-oxide, 6 and a combination of etched glass with zinc-oxide. 7 Even though the potential of using of high performance TCOs has been already investigated, 8 a physical explanation of why these textures result in high scattering properties is still missing.…”

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confidence: 99%

Modulated surface textures for enhanced light trapping in thin-film silicon solar cells

Isabella

Krč

Zeman

2010

Applied Physics Letters

126

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Substrates with a modulated surface texture were prepared by combining different interface morphologies. The spatial frequency surface representation method is used to evaluate the surface modulation. When combining morphologies with appropriate geometrical features, substrates exhibit an increased scattering level in a broad wavelength region. We demonstrate that the improved scattering properties result from a superposition of different light scattering mechanisms caused by the different geometrical features integrated in a modulated surface texture. © 2010 American Institute of Physics. ͓doi:10.1063/1.3488023͔ Light-trapping is an essential approach in thin-film silicon solar cells to increase the effective optical path in thin absorber layers. It uses scattering of light at rough interfaces, introduced into the solar cell by means of substrates coated with a randomly surface-textured transparent-conductiveoxide ͑TCO͒ layer. 1 The multijunction approach is widely used in these solar cells. 2,3 Employing different absorber materials in multi-junction solar cells, such as amorphous silicon alloys and microcrystalline silicon, efficient light trapping is required at long wavelengths ͑up to 1100 nm͒. To meet this demand, TCO substrates with different surface textures have recently been developed and tested in solar cells, such as optimized wet-etched 4 or surface plasma-treated 5 zinc-oxide, double-textured tin-oxide, 6 and a combination of etched glass with zinc-oxide. 7 Even though the potential of using of high performance TCOs has been already investigated, 8 a physical explanation of why these textures result in high scattering properties is still missing.In this paper we introduce and analyze a more general concept of surface textures for enhanced scattering in a broad wavelength range, namely a modulated surface texture. We demonstrate that the enhanced scattering is achieved by superposition of different scattering mechanisms caused by the different geometrical features integrated in a modulated surface texture.A substrate with a modulated surface texture can be prepared as a stack of layers in which a different texture is introduced at individual interfaces. Provided the layers are thin enough the textures of the individual interfaces are transferred to a subsequent interface. The resulting surface of the stack accommodates all the morphological components introduced at the individual interfaces. The stack may comprise layers of the same or different materials and a broad range of lateral and vertical geometrical features introduced at interfaces. By combining appropriate geometrical features introduced at the individual interfaces one can take advantage of superimposing the scattering mechanisms caused by these different geometrical features and achieving higher scattering levels in a broad wavelength range in comparison to the scattering contributions from individual morphologies.When the geometrical dimensions of the rough surface are larger than the wavelength of light, the scattering with strongly d...

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“…For HMGZO thin films, the main mechanism of absorption in the NIR region is free-carrier absorption, induced by vibrations in the free-carrier ensemble, which resonate with the alternating electric field of the radiation in the NIR [28,29]. According to Drude's theory [30],…”

Section: Optical Transmittances and Band Gap Of Hmgzo Thin Filmsmentioning

confidence: 99%

Wide-spectrum Mg and Ga co-doped ZnO–TCO thin films with introduced hydrogen grown by magnetron sputtering at room temperature

Tian

Chen

Liu

et al. 2014

Applied Surface Science

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ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells

Cited by 86 publications

References 14 publications

Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis

Tuning the crystallographic, morphological, optical and electrical properties of ZnO:Al grown by spray pyrolysis

Modulated surface textures for enhanced light trapping in thin-film silicon solar cells

Wide-spectrum Mg and Ga co-doped ZnO–TCO thin films with introduced hydrogen grown by magnetron sputtering at room temperature

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