Zn-Ti oxo cluster photoresists for EUV Lithography: Cluster structure and lithographic performance

Wang, Daohan; Xu, Runfeng; Zhou, Danhong; Zhao, Jun; Zhang, Jianhua; Chen, Pengzhong; Peng, Xiaojun

doi:10.1016/j.cej.2024.152315

Cited by 1 publication

(1 citation statement)

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“…Titanium-oxo clusters (TOCs) have gained significant attention in recent years due to their fascinating structures and potential applications in photocatalytic water splitting [ 1 , 2 , 3 ], solar cells [ 4 , 5 , 6 ], photocatalytic degradation of pollutants [ 7 , 8 , 9 ], photocatalytic organic synthesis [ 10 , 11 , 12 , 13 ], CO 2 reduction [ 14 , 15 ], and other areas [ 16 , 17 ]. The driving force behind TOC research lies in their ability to serve as structural and reactivity models for TiO 2 materials.…”

Section: Introductionmentioning

confidence: 99%

Phenanthroline-Mediated Photoelectrical Enhancement in Calix[4]arene-Functionalized Titanium-Oxo Clusters

Hou,

Huang,

Liu

et al. 2024

Molecules

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Incorporating two organic ligands with different functionalities into a titanium-oxo cluster entity simultaneously can endow the material with their respective properties and provide synergistic performance enhancement, which is of great significance for enriching the structure and properties of titanium-oxo clusters (TOCs). However, the synthesis of such TOCs is highly challenging. In this work, we successfully synthesized a TBC4A-functionalized TOC, [Ti2(TBC4A)2(MeO)2] (Ti2; MeOH = methanol, TBC4A = tert-butylcalix[4]arene). By adjusting the solvent system, we successfully introduced 1,10-phenanthroline (Phen) and prepared TBC4A and Phen co-protected [Ti2(TBC4A)2(Phen)2] (Ti2-Phen). Moreover, when Phen was replaced with bulky 4,7-diphenyl-1,10-phenanthroline (Bphen), [Ti2(TBC4A)2(Bphen)2] (Ti2-Bphen), which is isostructural with Ti2-Phen, was obtained, demonstrating the generality of the synthetic method. Remarkably, Ti2-Phen demonstrates good stability and stronger light absorption, as well as superior photoelectric performance compared to Ti2. Density functional theory (DFT) calculations reveal that there exists ligand-to-core charge transfer (LCCT) in Ti2, while an unusual ligand-to-ligand charge transfer (LLCT) is present in Ti2-Phen, accompanied by partial LCCT. Therefore, the superior light absorption and photoelectric properties of Ti2-Phen are attributed to the existence of the unusual LLCT phenomenon. This study not only deeply explores the influence of Phen on the performance of the material but also provides a reference for the preparation of materials with excellent photoelectric performance.

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