Zn&lt;sub&gt;1-x&lt;/sub&gt;Cu&lt;sub&gt;x&lt;/sub&gt;O Films Grown by Remote-plasma-enhanced Metalorganic Chemical Vapor Deposition with Cu(dibm)&lt;sub&gt;2&lt;/sub&gt;

Hu, Bing; Adachi, Makoto; Aoshima, T.; Nakamura, Atsushi; Temmyo, Jiro

doi:10.7567/ssdm.2008.p-9-2

Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials 2008

DOI: 10.7567/ssdm.2008.p-9-2

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Zn1-xCuxO Films Grown by Remote-plasma-enhanced Metalorganic Chemical Vapor Deposition with Cu(dibm)2

Bing Hu

Makoto Adachi

T. Aoshima

et al.

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Zn<sub>1-x</sub>Cu<sub>x</sub>O Films Grown by Remote-plasma-enhanced Metalorganic Chemical Vapor Deposition with Cu(dibm)<sub>2</sub>

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