Zinc-air microbattery with electrode array of zinc microposts

Chamran, F.; Min, Hong‐Shick; Dunn, Bruce; Kim, Chang‐Jin

doi:10.1109/memsys.2007.4433097

Cited by 11 publications

(16 citation statements)

References 8 publications

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“…In contrast, a decreasing trend is observed in the energy densities of thin-film microbatteries as the discharge rate is increased and then the areal energy density drops dramatically around 10 mA of discharge current. A similar decreasing trend of the energy densities has recently been reported for the commercial zinc-air batteries as well, where the anode electrode is made of zinc powder [5]. Areal capacities of these batteries are illustrated and compared in figure 8 as a function of discharge rate.…”

Section: Evaluation Of the Battery Performancesupporting

confidence: 76%

“…However, it has been recently shown that especially at high discharge rates, zinc oxide formation on the anode surface over time results in an increase in the internal resistance that limits the discharge rate of the battery and thus decreases its performance [5]. In order to maintain the inherent high energy density and improve the discharge characteristics of the zinc-air battery, microfabricated zinc-air batteries with well-ordered 3D Zn pillar microstructures for high surface area and reduced internal resistance have been demonstrated [5,6]. The work reported herein focuses on the development of 3D Zn anode structures coated on a highly laminated metallic substructure 'skeleton', based on a sequential multilayer robotic electroplating process [7].…”

Section: Introductionmentioning

confidence: 99%

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A MEMS-enabled 3D zinc–air microbattery with improved discharge characteristics based on a multilayer metallic substructure

Armutlulu

Fang

Kim

et al. 2011

J. Micromech. Microeng.

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This paper reports the design, fabrication and testing of a three-dimensional zinc-air microbattery with improved areal energy density and areal capacity, particularly at high discharge rates. The device is based on a multilayer, micron-scale, low-resistance metallic skeleton with an improved surface area. This skeleton consists of alternating Cu and Ni layers supporting Zn as electrodeposited anode electrode, and provides a high surface area, low-resistance path for electron transfer. A proof-of-concept zinc-air microbattery based on this technology was developed, characterized and compared with its two-dimensional thin-film counterparts fabricated on the same footprint area with equal amount of the Zn anode electrode. Using this approach, we were able to improve a single-layer initial structure with a surface area of 1.3 mm 2 to a scaffold structure with ten layers having a surface area of 15 mm 2. Discharging through load resistances ranging from 100 to 3000 , the areal energy density and areal capacity of the microbattery were measured as 2.5-3 mWh cm −2 and ∼2.5 mAh cm −2 , respectively.

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Section: Evaluation Of the Battery Performancesupporting

confidence: 76%

Section: Introductionmentioning

confidence: 99%

A MEMS-enabled 3D zinc–air microbattery with improved discharge characteristics based on a multilayer metallic substructure

Armutlulu

Fang

Kim

et al. 2011

J. Micromech. Microeng.

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“…With respect to applications, although we do not report here, the results obtained in this paper can be immediately applied to our 3-D microbattery research [3], [4]. For example, a significant increase in the charge per area (mAh/cm 2 ), commonly called areal energy density, can be obtained by increasing the aspect ratio of the electrodes in a 3-D zinc-air battery, which represents an important design criterion for 3-D batteries.…”

Section: E Further Discussionmentioning

confidence: 83%

“…The electroplating setup was also developed in-house and produced VHAR metal structures of ∼0.5 and 1 cm 2 in area-the sample size needed for our 3-D microbattery research [3], [4]. All the results in this paper, including the yields, have been based on 20 samples produced for the 3-D microbattery project through at least 15 times of different fabrication runs.…”

Section: E Further Discussionmentioning

confidence: 99%

“…Such HAR electrical feedthroughs offer significant improvements over 2-D packaging in response time, integration density, and reliability. For another example, dense arrays of HAR metal (e.g., zinc and nickel) posts were fabricated to serve as the electrodes of 3-D microbatteries [3], [4], which produce more energy and power than the traditional (i.e., 2-D) batteries on a given footprint area while sustaining high discharge rates [5]. For both the examples, one typically makes a mold by etching HAR through-holes and fills it with metals by electroplating.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of Very-High-Aspect-Ratio Microstructures in Complex Patterns by Photoelectrochemical Etching

Sun

Zhao

Kim

2012

J. Microelectromech. Syst.

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Abstract-A high-yield fabrication process for dense arrays of very-high-aspect-ratio (VHAR) freestanding metal posts and gratings is developed. Silicon molds of regularly arranged throughholes or trenches are first fabricated by photoelectrochemical etching. By studying the etching parameters, including geometry constraint, current density and potential, electrolyte concentration, and etching time, we succeed to produce dense arrays of VHAR holes (depth = 610 μm; diameter = 5 μm; pitch = 14 μm) and trenches (depth = 320 μm; width = 4 μm; pitch = 8 μm) with yields higher than 99% on 2-cm 2 processing areas. The VHAR molds are then filled with metals using a new bottom-up electroplating technique, which features an intermittent vacuum degassing to remove the air and hydrogen bubbles from such deep and narrow voids during the plating.

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Zn Microbatteries Explore Ways for Integrations in Intelligent Systems

Quhe

Zhang

et al. 2023

Small

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As intelligent microsystems develop, many revolutionary applications, such as the swallowing surgeon proposed by Richard Feynman, are about to evolve. Nonetheless, integrable energy storage satisfying the demand for autonomous operations has emerged as a major obstacle to the deployment of intelligent microsystems. A reason for the lagging development of integrable batteries is the challenge of miniaturization through microfabrication procedures. Lithium batteries, generated by the most successful battery chemistry, are not stable in the air, thus creating major manufacturing challenges. Other cations (Na+, Mg2+, Al3+, K+) are still in the early stages of development. In contrast, the superior stability of zinc batteries in the air brings high compatibility to microfabrication protocols and has already demonstrated excellent practicability in full‐sized devices. To obtain energy‐dense and high‐power zinc microbatteries within square‐millimeter or smaller footprints, sandwich, pillar, and Swiss‐roll configurations are developed. Thin interdigital and fiber microbatteries find their applications being integrated into wearable devices and electronic skin. It is foreseeable that zinc microbatteries will find their way into highly integrated microsystems unlocking their full potential for autonomous operation. This review summarizes the material development, configuration innovation, and application‐oriented integration of zinc microbatteries.

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Zinc-air microbattery with electrode array of zinc microposts

Cited by 11 publications

References 8 publications

A MEMS-enabled 3D zinc–air microbattery with improved discharge characteristics based on a multilayer metallic substructure

A MEMS-enabled 3D zinc–air microbattery with improved discharge characteristics based on a multilayer metallic substructure

Fabrication of Very-High-Aspect-Ratio Microstructures in Complex Patterns by Photoelectrochemical Etching

Zn Microbatteries Explore Ways for Integrations in Intelligent Systems

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