Zero and Near Zero Power Intelligent Microsystems

Abstract

The Near Zero Power RF and Sensor Operations (N-ZERO) program from DARPA has created a new, nanowatt class of intelligent sensors and RF receivers enabling systems that are passive or nearly passive while operating in an intelligent standby mode. Such systems can be persistently powered by small batteries for many years or perpetually via miniature energy harvesters. The program sought wake-up receivers with a sensitivity of -100dBm and physical sensors that could classify vehicles at a range of 10 m, with power consumption on order of the self-discharge rate of a small battery. Furthermore, researchers with designs that fit other applications, such as chemical and IR sensors, were open to participate as well. From the program multiple approaches have emerged featuring passive and active MEMS devices and subthreshold CMOS circuits. The overall goals of the program have helped to redefine the state-of-the art in ultra-low power receivers, machine learning processors, and passive physical sensors.

Near‐Zero Power MOF‐Based Sensors for NO2 Detection

“…[ 38 ] Importantly, and with far reaching industrial applications, the picowatt power expense of these MOF‐based active materials far exceed DARPA's 10 nW threshold for near‐zero power applications. [ 8 ]…”

“…[ 7 ] By decreasing power requirements to “near‐zero” (<10 nW), robust, long‐lived sensing could be achieved in a wider range of environments. [ 8 ] While nanogap‐style architectures have been shown successful for near‐zero power detection of some organics, [ 9 ] the incorporation of nanoporous metal–organic frameworks (MOFs) offer an attractive alternative.…”

“…of environments. [8] While nanogap-style architectures have been shown successful for near-zero power detection of some organics, [9] the incorporation of nanoporous metal-organic frameworks (MOFs) offer an attractive alternative.…”

Semiconductor Nanowire Arrays for High‐Performance Miniaturized Chemical Sensing

“…Such power consumption is way below the near‐zero power applications threshold of 10 nW, as defined by “The Near Zero Power RF and Sensor Operations (N‐ZERO) program from DARPA”. [ 44 ] To quantify the sensing performance, the change in current ratio, R = ( I air − I gas )/ I air × 100% is calculated and plotted in Figure a–c for sensors with a diameter of 100, 200, 300 nm and pitch size of 1000 nm (D100P1000, D200P1000, D300P1000). It can be clearly observed that the sensing response increases dramatically with decreasing of NW diameter.…”

“…[40,41] It was also reported that indium phosphide (InP) epitaxial layer could achieve ≈0.1 ppm level sensitivity to NO 2 at relatively lower working temperature (80-150 °C) indicating their potential for room-temperature NO 2 sensing. [42][43][44] Most of the reports on InP NO 2 sensor focused on planar structure, [45][46][47] while their nanostructures have rarely been studied.…”