2008
DOI: 10.3390/s8127904
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Zeolite-based Impedimetric Gas Sensor Device in Low-cost Technology for Hydrocarbon Gas Detection

Abstract: Due to increasing environmental concerns the need for inexpensive selective gas sensors is increasing. This work deals with transferring a novel zeolite-based impedimetric hydrocarbon gas sensor principle, which has been originally manufactured in a costly combination of photolithography, thin-film processes, and thick-film processes to a low-cost technology comprising only thick-film processes and one electroplating step. The sensing effect is based on a thin chromium oxide layer between the interdigital elec… Show more

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Cited by 41 publications
(31 citation statements)
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References 32 publications
(51 reference statements)
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“…Besides that, impedimetric sensors based on zeolites [14][15][16][17] or on strong acids like tungstated zirconia [18,19], or resistive molybdenum oxide based sensors [20] are suggested and investigated.…”
Section: Introductionmentioning
confidence: 99%
“…Besides that, impedimetric sensors based on zeolites [14][15][16][17] or on strong acids like tungstated zirconia [18,19], or resistive molybdenum oxide based sensors [20] are suggested and investigated.…”
Section: Introductionmentioning
confidence: 99%
“…A careful control of the purity, microstructure and thickness of the chromia films is essential for the fabrication of reliable sensors. This is best achieved with established thin film deposition techniques by physical or chemical vapour deposition, while fabrication concepts entirely based on thick film printing techniques are questionable 44.…”
Section: Discussionmentioning
confidence: 99%
“…So wirken ZSM-5-Filme, die in einfacher Dickschichttechnik und mit Galvanikprozessen mit einer Chromoxid-Grenzfläche kombiniert werden, als hoch selektive Kohlenwasserstoffsensoren [66]. Ein deutlicher Anstieg der Impedanz bei niedrigen Frequenzen tritt nur auf, wenn zwischen dem Zeolithen und dem p-leitenden Cr 2 O 3 ein deutlicher Grenzflächenkon-takt vorliegt und die unterschiedlichen Leitfä-higkeiten für Sauerstoffionen in den beiden Materialien zum Tragen kommen [67]. Interessant ist auch der Ansatz, Zeolithschichten auf nur halbwegs selektive konduktometrische Gassensoren (vor allem p-leitende Halbleitergassensoren) aufbringen und damit deren Selektivität zu erhöhen und somit hochwirksame Sensoren für Kohlenwasserstoffe zu entwickeln [68].…”
Section: In Nanoporen Stabilisierte Farbstoffeunclassified