Young's Modulus of a-SiC:H Determined by the Resonant Frequency of Thermally Driven Cantilevers

Rehder, Gustavo P.; Carreño, M.N.P.

doi:10.1149/1.2813485

ECS Trans.

2007

DOI: 10.1149/1.2813485

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Young's Modulus of a-SiC:H Determined by the Resonant Frequency of Thermally Driven Cantilevers

Gustavo P. Rehder¹,

M.N.P. Carreño²

Abstract: This paper describes the determination of the Young'

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Young's Modulus of a-SiC:H Determined by the Resonant Frequency of Thermally Driven Cantilevers

Abstract: This paper describes the determination of the Young'

Cited by 0 publications

References 19 publications

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