2005
DOI: 10.1016/j.tsf.2005.06.048
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Young's modulus and hardness of Pd thin films

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Cited by 37 publications
(19 citation statements)
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“…[ 48,49 ] In a similar manner, the local strain applied to the Pd electrodes was also estimated to be ∼0.22% which is also small enough to keep the stable electrical performances under the pre-strain and releasing deformation. [ 50 ] By a serial connection of three SWCNT CMOS inverters, a ring oscillator can be fabricated and a stable device performance is expected only with the reproducible performance of the individual inverter. Optical microscope images of ring-oscillator array on SiO 2 substrate prior to the transfer onto PDMS, and those on PDMS substrate under different pre-strains are shown in Figure 7 (a).…”
Section: Resultsmentioning
confidence: 99%
“…[ 48,49 ] In a similar manner, the local strain applied to the Pd electrodes was also estimated to be ∼0.22% which is also small enough to keep the stable electrical performances under the pre-strain and releasing deformation. [ 50 ] By a serial connection of three SWCNT CMOS inverters, a ring oscillator can be fabricated and a stable device performance is expected only with the reproducible performance of the individual inverter. Optical microscope images of ring-oscillator array on SiO 2 substrate prior to the transfer onto PDMS, and those on PDMS substrate under different pre-strains are shown in Figure 7 (a).…”
Section: Resultsmentioning
confidence: 99%
“…Equations (1), (4) and (5) constitute a two-parameter (  and  ) representation of the surface oxide-induced strain in the Pd wire. Young's Modulus for bulk Pd is 170 GPa [15] and that of PdO is estimated to be 169 GPa [16]. This leads to the…”
Section: Thermocouple Response To Tensile Stressmentioning
confidence: 99%
“…Mechanical propa e-mail: mgksp@uohyd.ernet.in erties assume importance especially in the case of thick films since surface layers of these films may be exposed to external mechanical effects including wear, damage and thermal degradation [21]. Recently, nanoindentation techniques have been employed extensively to quantify the mechanical properties of thin films [22][23][24][25] such as hardness, elastic modulus and adhesion. Among these, the adhesion of coatings to the substrates is a key factor for the mechanical behavior of coated parts [24].…”
Section: Introductionmentioning
confidence: 99%