“…For example, the EPR signal of g = 1.96 was attributed to oxygen vacancy, 10 but some others argued that the oxygen vacancy signal was at g = 1.99. 11 The green luminescence at about 2.4 eV was correlated with oxygen vacancy by many researchers, [12][13][14][15] but it was also attributed to other defects such as V Zn , 16,17 Zn i , 18,19 O Zn , 20,21 and even Cu impurities. 22 DLTS revealed a major defect level L2 at E c − 0.3 eV in the as-grown ZnO, but the assignment of this level is also rather difficult.…”