YBa/sub 2/Cu/sub 3/O/sub 7/ superconductor microbolometer arrays fabricated by silicon micromachining

Johnson, B. C.; Ohnstein, T.; Han, C. J.; Higashi, Robert E.; Kruse, Paul W.; Wood, Roger; Marsh, Holly A.; Dunham, S.B.

doi:10.1109/77.233997

Cited by 23 publications

(20 citation statements)

References 6 publications

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“…This technology is attractive, because the high TCR at the superconducting transition yields high responsivities-up to 60 kV/W [8]. Detectivities have been measured in the 10 cm Hz /W range on a similar compound GdBa Cu O - [16].…”

Section: Mgo Sacrificial Layer For Micromachining Uncooled Y-ba-cu-o mentioning

confidence: 99%

“…Micromachining techniques reported in the literature in conjunction with superconducting YBCO bolometers have mostly utilized wet etching of silicon with a potassium hydroxide (KOH) solution to obtain suspended structures [8], [11], [12], although reactive-plasma etching can also be used to remove the silicon isotropically under the detector element [15]. In general, Si N is the most common material for surface micromachined bolometers [8], although yttria-stabilized zirconia (YSZ) has also been used [12].…”

Section: Mgo Sacrificial Layer For Micromachining Uncooled Y-ba-cu-o mentioning

confidence: 99%

“…For most YBCO applications, gold is the contact metal of choice as many metals have high contact resistance with YBCO [36], [8], [12], [13], [37]. Also, the work function of gold is suitable for providing ohmic contacts.…”

Section: Fabricationmentioning

confidence: 99%

“…In general, Si N is the most common material for surface micromachined bolometers [8], although yttria-stabilized zirconia (YSZ) has also been used [12]. Surface micromachining can be done before [12] or after the deposition of YBCO [8], [11].…”

Section: Mgo Sacrificial Layer For Micromachining Uncooled Y-ba-cu-o mentioning

confidence: 99%

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MgO sacrificial layer for micromachining uncooled Y-Ba-Cu-O IR microbolometers on Si/sub 3/N/sub 4/ bridges

Gray

Çelik‐Butler

Butler

1999

J. Microelectromech. Syst.

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This paper describes a new micromachining technique for fabrication of semiconducting yttrium barium copper oxide (YBCO) microbolometers using magnesium oxide (MgO) as the sacrificial layer. This type of bolometer can be operated at room temperature, providing a low-cost alternative for more expensive cryogenically cooled thermal detectors used for infrared (IR) imaging. The new micromachining techniques described here would enable the fabrication of YBCO IR focal plane array (FPA) with CMOS signal processing circuitry. Devices were fabricated by growing YBCO films on 4000-Å-thick suspended Si3N4 membranes measuring 40 2 40 m 2 in area and extended over micromachined air gaps, which provide the low thermal conductivity that is required for high responsivity. The gap was created by etching an MgO sacrificial layer. This is the first example of using MgO in this type of application. The MgO sacrificial layer technique is fully CMOS compatible and presents no major fabrication challenges. Thermal conductivities achieved in vacuum with the Si3N4 suspended structures were on the order of 10 07 W/K, yielding an effective thermal isolation for bolometer operation. Optical characterization has shown responsivity up to 60 kV/W and detectivity over 10 8 cm 1 Hz 1=2 /W to black-body IR radiation, indicating that this technology is a suitable candidate for low-cost thermal imaging. [370]

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Section: Mgo Sacrificial Layer For Micromachining Uncooled Y-ba-cu-o mentioning

confidence: 99%

Section: Mgo Sacrificial Layer For Micromachining Uncooled Y-ba-cu-o mentioning

confidence: 99%

Section: Fabricationmentioning

confidence: 99%

Section: Mgo Sacrificial Layer For Micromachining Uncooled Y-ba-cu-o mentioning

confidence: 99%

See 2 more Smart Citations

MgO sacrificial layer for micromachining uncooled Y-Ba-Cu-O IR microbolometers on Si/sub 3/N/sub 4/ bridges

Gray

Çelik‐Butler

Butler

1999

J. Microelectromech. Syst.

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“…A NTENNA-COUPLED bolometers, also known as microbolometers, are effective optical receivers and are particularly useful in the far infrared and millimeter wave regime of the electromagnetic spectrum [1], [2]. Their performance exceeds those of conventional composite microbolometers at wavelengths of 100 m since they do not rely on special optical absorber films that are commonly inefficient in the far infrared region [3].…”

Section: Introductionmentioning

confidence: 99%

Thermal budget calculations, design aspects, and device performance of high-Tc air-bridged microbolometers

Neff¹,

Berg²,

Barth

1997

IEEE Trans. Appl. Supercond.

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The thermal properties of an air-bridged microbolometer have been evaluated on the basis of a finite element calculation scheme for the first time. The numerical results show that the performance of the device's sensitively depends on geometry and layout. The degree of thermal coupling and interaction with the heat sink affects the thermal time constant and frequency range of operation. For identical geometries, experimental and modeled data are in good agreement. The length of the air-bridge is defining the effective thermal time constant but has little effect on the thermal responsivity. An unusually high responsivity has been calculated for configurations where the thermal coupling to the heat sink has been minimized. This design leads to an increase of responsivity of a factor of 200 and would establish superior operation of the device even at ambient temperature.

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Infrared Detector Arrays, Uncooled

Çelik‐Butler

Butler

1999

Wiley Encyclopedia of Electrical and Electronics Engineering

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YBa/sub 2/Cu/sub 3/O/sub 7/ superconductor microbolometer arrays fabricated by silicon micromachining

Cited by 23 publications

References 6 publications

MgO sacrificial layer for micromachining uncooled Y-Ba-Cu-O IR microbolometers on Si/sub 3/N/sub 4/ bridges

MgO sacrificial layer for micromachining uncooled Y-Ba-Cu-O IR microbolometers on Si/sub 3/N/sub 4/ bridges

Thermal budget calculations, design aspects, and device performance of high-Tc air-bridged microbolometers

Infrared Detector Arrays, Uncooled

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