The microstructural changes associated with the reduced dependence of critical current density (J c ) versus thickness of thick, epitaxial YBa 2 Cu 3 O 7−␦ (YBCO) films on rolling-assisted biaxially textured substrates (RABiTS) were investigated. Pulsed laser deposited YBCO films varying in thickness from 1.0 to 6.4 m on RABiTS with an architecture of Ni-3 at.% W/Y 2 O 3 /yttrium-stabilized-zirconia/CeO 2 /YBCO were prepared for cross-sectional transmission electron microscopy studies. Dramatic improvements in physical properties and microstructural quality were observed resulting from the use of Ni-3 at.% W substrates, which provided a sharper texture over earlier Ni substrates, and replacement of CeO 2 with Y 2 O 3 as the seed layer within the buffers. The YBCO films showed exceptional orientation up to 6.4 m thickness, with no misoriented grains or dead layers observed and only limited reaction between the YBCO and CeO 2 cap layer. The high quality of the films was also attributed in part to the formation of a tungsten oxide layer forming at the top of the Ni-3% W substrate, limiting the growth of deleterious NiO into the conductor.