XUV spectroscopic studies of plasma plumes produced from boron, boron carbide and boron nitride targets by a laser

Atwee, T.; Harilal, S. S.; Kunze, H.‐J.

doi:10.1088/0022-3727/34/8/312

Cited by 14 publications

(10 citation statements)

References 18 publications

(25 reference statements)

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“…7 is similar to results presented previously. In both cases, a constant N e value was utilized, 34 and that value was calculated via a fitted Stark parameter which was simulated via a postprocessor code. Two T ionz profiles were reported.…”

Section: A T Ionz Dependency On N Ementioning

confidence: 99%

Plasma diagnostics for investigating extreme ultraviolet light sources

Yeates

White

Kennedy

2010

Journal of Applied Physics

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Plasma temperature and density diagnostics are crucial for lithographic applications of extreme ultraviolet light sources. One widely used technique employs line intensity ratios of successively charged ion states to determine the ion temperature ͑T ionz ͒. This work comprises a detailed "stress-test" of the applied technique, where space and time resolved emission in laser-produced plasmas were studied, using a Nd:yttrium aluminum garnet laser pulse incident on an aluminum target in the 26.5-32.5 nm range. Detailed hydrodynamic simulations also investigate the dependency of ion temperature on electron density and the charge states for various line combinations ͑Al VI/V, Al VII/VI, Al VIII/VII, Al IX/VIII, and Al X/IX͒.

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Section: A T Ionz Dependency On N Ementioning

confidence: 99%

Plasma diagnostics for investigating extreme ultraviolet light sources

Yeates

White

Kennedy

2010

Journal of Applied Physics

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“…In contrast spectroscopic investigations of colliding laser plasma plumes have concentrated on short wavelength studies i.e. vacuum ultraviolet (VUV) 15 , extreme ultraviolet (EUV) and xray spectral ranges [16][17][18][19][20][21][22][23][24][25][26] . Attempts have also been made to simulate colliding laser plasma plumes for comparison with experimental results 21,[26][27][28] .…”

Section: Introductionmentioning

confidence: 99%

Charge resolved electrostatic diagnostic of colliding copper laser plasma plumes

Yeates¹,

Fallon²,

Kennedy³

et al. 2011

Physics of Plasmas

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“…The LPP community extensively uses ICCD cameras to capture plasma images in the optical spectral region (Harilal et al, 2003;Siegel et al, 2004). For shorter wavelengths (X-ray, EUV, and VUV), vacuum-compatible cameras or microchannel plates coupled to a CCD are used in conjunction with a pinhole camera (Atwee et al, 2001). In this scenario, the position of the pinhole with respect to the source and camera determines the magnification.…”

Section: Imaging a Emission Imagingmentioning

confidence: 99%

Optical diagnostics of laser-produced plasmas

Harilal,

Phillips,

Froula

et al. 2022

Preprint

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Laser-produced plasmas (LPPs) engulf exotic and complex conditions ranging in temperature, density, pressure, magnetic and electric fields, charge states, charged particle kinetics, and gas-phase reactions, based on the irradiation conditions, target geometries, and the background cover gas. The application potential of the LPP is so diverse that it generates considerable interest for both basic and applied research areas. The fundamental research on LPPs can be traced back to the early 1960s, immediately after the invention of the laser. In the 1970s, the laser was identified as a tool to pursue inertial confinement fusion, and since then, several other technologies emerged out of LPPs. These applications prompted the development and adaptation of innovative diagnostic tools for understanding the fundamental nature and spatiotemporal properties of these complex systems. Although most of the traditional characterization techniques developed for other plasma sources can be used to characterize the LPPs, care must be taken to interpret the results because of their small size, transient nature, and inhomogeneities. The existence of the large spatiotemporal density and temperature gradients often necessitates non-uniform weighted averaging over distance and time. Among the various plasma characterization tools, optical-based diagnostic tools play a key role in the accurate measurements of LPP parameters. The optical toolbox contains optical probing methods (Thomson scattering, shadowgraphy, Schlieren, interferometry, velocimetry, and deflectometry), optical spectroscopy (emission, absorption, and fluorescence), and passive and active imaging. Each technique is useful for measuring a specific property, and its use is limited to a certain time span during the LPP evolution because of the sensitivity issues related to the selected measuring tool. Therefore, multiple diagnostic tools are essential for a comprehensive insight into the entire plasma behavior. In recent times, the improvements in performance in the lasers and detector systems expanded the capability of the aforementioned passive and active diagnostics tools. This review provides an overview of optical diagnostic tools frequently employed for the characterization of the LPPs and emphasizes techniques, associated assumptions, and challenges.

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XUV spectroscopic studies of plasma plumes produced from boron, boron carbide and boron nitride targets by a laser

Cited by 14 publications

References 18 publications

Plasma diagnostics for investigating extreme ultraviolet light sources

Plasma diagnostics for investigating extreme ultraviolet light sources

Charge resolved electrostatic diagnostic of colliding copper laser plasma plumes

Optical diagnostics of laser-produced plasmas

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