1991
DOI: 10.1002/sia.740171010
|View full text |Cite
|
Sign up to set email alerts
|

XPS study of the Sc/SiOx interface at room temperature

Abstract: The reducing reaction of vapourdeposited scandium layers on silicon oxide at room temperature has been investigated using XPS. The redox reaction took place during the deposition period and diminished the thickness of the silicon oxide layer by -0.3 nm. No further reaction during the 8 b following deposition was detected.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

1
2
0

Year Published

2018
2018
2020
2020

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(3 citation statements)
references
References 7 publications
1
2
0
Order By: Relevance
“…Clear trends with photon energy and acid treatment are seen in the Y 3d core levels in Figure . For both samples (as‐deposited and after acid treatment) there are three contributions to the overall signal: bulk metallic yttrium (Y 0 ) around 155.9 eV (3d 5/2 ), yttrium oxide (Y 3+ ) around 158 eV , . There is a third peak that we assign to substochiometric Pt 3 Y oxide (Y–O) around 157 eV; where the material composition and oxidation is different to Y 2 O 3 , .…”
Section: Resultssupporting
confidence: 90%
“…Clear trends with photon energy and acid treatment are seen in the Y 3d core levels in Figure . For both samples (as‐deposited and after acid treatment) there are three contributions to the overall signal: bulk metallic yttrium (Y 0 ) around 155.9 eV (3d 5/2 ), yttrium oxide (Y 3+ ) around 158 eV , . There is a third peak that we assign to substochiometric Pt 3 Y oxide (Y–O) around 157 eV; where the material composition and oxidation is different to Y 2 O 3 , .…”
Section: Resultssupporting
confidence: 90%
“…Losses are observed in the SiO 2 phonon modes that attenuate before the 10th exposure of 1 , proving that the passivating interface layer grows during the first 7–10 exposures of 1 at 275 °C, regardless of the thickness of the initial SiO 2 layer (Figure S15). For comparison, a previous study evaluated a Sc/SiO x /Si system by XPS after evaporating scandium metal onto a 1.5 nm thick SiO x layer maintained at room temperature . A redox reaction was confirmed at the Sc/SiO x interface following the deposition of a 3.1 nm thick scandium film.…”
Section: Results and Discussionmentioning
confidence: 99%
“…For comparison, a previous study evaluated a Sc/SiO x /Si system by XPS after evaporating scandium metal onto a 1.5 nm thick SiO x layer maintained at room temperature. 68 A redox reaction was confirmed at the Sc/SiO x interface following the deposition of a 3.1 nm thick scandium film. Analysis of the Si 2p core level showed a small new peak, corresponding to silicon atoms in a local environment that is different from that inside bulk silicon.…”
Section: And Figures S12−s14)mentioning
confidence: 92%