2001
DOI: 10.1016/s0040-6090(01)00982-8
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XPS study of the L-CVD deposited SnO2 thin films exposed to oxygen and hydrogen

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Cited by 228 publications
(153 citation statements)
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“…In fact, the intensity of this binding energy was reduced compared with the present ZnO film (not shown here) which indicates that this binding energy was suppressed by Sn 4þ ion doping. 27) Figure 3(c) shows two strong peaks at 1020.6 eV and 1043.8 eV which correspond with Zn 2p3/2 and Zn 2p1/2 , respectively, consistent with the Zn 2þ ion binding found in previous reports. 28,29) Furthermore, the Sn 3d5/2 and Sn 3d3/2 peaks shown in Fig.…”
Section: Crystallization Observation and Characteristics Of Szo Filmssupporting
confidence: 90%
“…In fact, the intensity of this binding energy was reduced compared with the present ZnO film (not shown here) which indicates that this binding energy was suppressed by Sn 4þ ion doping. 27) Figure 3(c) shows two strong peaks at 1020.6 eV and 1043.8 eV which correspond with Zn 2p3/2 and Zn 2p1/2 , respectively, consistent with the Zn 2þ ion binding found in previous reports. 28,29) Furthermore, the Sn 3d5/2 and Sn 3d3/2 peaks shown in Fig.…”
Section: Crystallization Observation and Characteristics Of Szo Filmssupporting
confidence: 90%
“…Thin films of the material are usually grown by radiofrequency magnetron sputtering, [2,13] although some other techniques, each having its own strong points, have also come into use. These techniques include mid-frequency dual magnetron sputtering, [11] bipolar pulsed magnetron sputtering, [14] direct current magnetron sputtering, [15] dual ion beam sputtering, [16] electron beam evaporation, [10] dual ion beam-assisted electron beam evaporation, [17] pulsed laser deposition, [18] atmospheric environment laser deposition, [19] rheotaxial growth and thermal oxidation, [20] spray pyrolysis, [6] ultrasonic spray pyrolysis, [5] sol-gel dip coating, [21] deposition from aqueous solutions, [22] and a variety of versions of CVD, viz., its atmospheric-pressure, [23] low-pressure, [24] ion beam-induced, [25] plasma-enhanced, [26] laser-induced, [27] photo-induced, [28] and atomic layer-controlled [29] variants. Recently, there has been considerable interest in epitaxial SnO 2 thin films.…”
Section: Introductionmentioning
confidence: 99%
“…For the particles, the reference was instead made to the Sn 3d core level at 486.6 eV (Sn(IV)). 44 The binding-energy scale was the Fermi level adjusted by measuring the Au 4f level of a clean Au foil. The spectra were recorded at normal photoelectron emission.…”
Section: ■ Experimental Sectionmentioning
confidence: 99%