2001
DOI: 10.1002/sia.955
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XPS, Raman spectroscopy, X‐ray diffraction, specular X‐ray reflectivity, transmission electron microscopy and elastic recoil detection analysis of emissive carbon film characterization

Abstract: For a better understanding of the physical and electronic properties of emissive carbon films, one of the best ways is to compare the results obtained with several surface and structural analysis techniques. In this article, different types of carbon film depositions for developing large flat panel displays by field emission displays are analysed and the results are correlated with their emissivity. Pulse laser ablation films, hightemperature plasma-enhanced chemical vapour deposition (PECVD) films and low-tem… Show more

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Cited by 62 publications
(35 citation statements)
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“…Similar to previous studies [14,16], 284.7 ± 0.2 and 285.6 ± 0.2 eV components in C1 s spectra are attributed to sp 2 and sp 3 bonds [22], namely, sp 2 hybridization of carbon atoms and sp 3 hybridization of C-C or C-H bonds, respectively [23]. The fitting results show that the fraction of the sp 2 bond is more than 80%, confirming the NCG formation on MgF 2 .…”
Section: Resultssupporting
confidence: 89%
“…Similar to previous studies [14,16], 284.7 ± 0.2 and 285.6 ± 0.2 eV components in C1 s spectra are attributed to sp 2 and sp 3 bonds [22], namely, sp 2 hybridization of carbon atoms and sp 3 hybridization of C-C or C-H bonds, respectively [23]. The fitting results show that the fraction of the sp 2 bond is more than 80%, confirming the NCG formation on MgF 2 .…”
Section: Resultssupporting
confidence: 89%
“…It also indicates that the film is composed of mostly carbon with traces of O and N. Chemical nature of the carbon is analyzed using curve fitting procedure ( figure 6, left). It shows that film is mostly composed of sp 2 carbon bonded to other sp 2 carbon with less quantity of sp 3 carbon bonded to other sp 3 carbon [29]. It also shows that some quantity of carbon is attached to O as well as to N. This fact is also supported by the characteristic peak for O and N in the XPS spectrum.…”
Section: Characterization Of Deposited Filmmentioning
confidence: 68%
“…The C 1s spectrum contained three components. The 285.2 eV peak was signed to graphite of the sp 2 -hybridized carbon, whereas the 286.7 eV peak was attributed to C-O bond [26,27]. The small peak around 289.2 eV was also observed on ZnO samples, which could be attributed to carboxyl-containing contamination, but it may be from the adsorbed atmospheric CO 2 .…”
Section: Characterizations Of Ag Modified C-zno Nanocrystalsmentioning
confidence: 72%