2014
DOI: 10.1002/sia.5669
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XPS depth analysis of metal/polymer multilayer by vacuum electrospray droplet impact

Abstract: Recently, the vacuum electrospray droplet impact (V-EDI) was developed as a cluster ion beam source in our laboratory. In this work, V-EDI was applied to polymers [polyimide (PI) and polycarbonate (PC)] and metal/polymer multilayer samples (Au/PI and Au/PC). We compared the etching performance of V-EDI with that obtained by the conventional atmospheric-pressure EDI (A-EDI). The nonselective etching was observed for organic and also inorganic samples by V-EDI as by A-EDI. Etching rates for the metal and polymer… Show more

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Cited by 14 publications
(13 citation statements)
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“…In our previous work using nonselected cluster beam by V-EDI, no selective etching for PI was also observed. [21] As shown in Fig. 3, however, a full width at half maximum (FWHM) of each element shows gradual broadening with irradiation time.…”
Section: Xps Analysis Obtained By Selected Charged Droplets Irradiationmentioning
confidence: 83%
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“…In our previous work using nonselected cluster beam by V-EDI, no selective etching for PI was also observed. [21] As shown in Fig. 3, however, a full width at half maximum (FWHM) of each element shows gradual broadening with irradiation time.…”
Section: Xps Analysis Obtained By Selected Charged Droplets Irradiationmentioning
confidence: 83%
“…Namely, no selective etching took place. In our previous work using non‐selected cluster beam by V‐EDI, no selective etching for PI was also observed . As shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
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