Visible up-conversion in ZnO:Er and ZnO:Er:Yb thin films deposited by RF magnetron sputtering under different O 2 -rich atmospheres has been studied. Conventional photoluminescence (325 nm laser source) and up-conversion (980 nm laser source) have been performed in the films before and after an annealing process at 800°C. The resulting spectra demonstrate that the thermal treatment, either during or postdeposition, activates optically the Er 3+ ions, being the latter process much more efficient. Moreover, the atmosphere during deposition was also found to be an important parameter, as the deposition under O 2 flow increases the optical activity of Er +3 ions. In addition, the inclusion of Yb 3+ ions into the films has shown an enhancement of the visible up-conversion emission at 660 nm by a factor of 4, which could be associated to either a better energy transfer from the 2 F 5/2 Yb level to the 4 I 11/2Er one, or to the prevention of having Er 2 O 3 clustering in the films.2