1996
DOI: 10.1016/0040-6090(95)08239-5
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XPS and X-ray diffraction studies of aluminum-doped zinc oxide transparent conducting films

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Cited by 538 publications
(246 citation statements)
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“…its intensity may be related to the variation of the concentration of oxygen vacancies. The peak at the highest BE position is usually attributed to chemisorbed oxygen species (that appears also in ZnO-based thin films without Er or Yb) [27,28] and/or to the formation of Er or Yb oxide [29,30]. Although the film surface was previously sputtered for three minutes, it does not strictly mean that the contamination component was completely removed [27,31].…”
Section: Resultsmentioning
confidence: 99%
“…its intensity may be related to the variation of the concentration of oxygen vacancies. The peak at the highest BE position is usually attributed to chemisorbed oxygen species (that appears also in ZnO-based thin films without Er or Yb) [27,28] and/or to the formation of Er or Yb oxide [29,30]. Although the film surface was previously sputtered for three minutes, it does not strictly mean that the contamination component was completely removed [27,31].…”
Section: Resultsmentioning
confidence: 99%
“…The medium binding energy of O 1s-2, whose intensity partly represents the variation in the concentration of oxygen vacancies, is related to the O 2− ions in the oxygen-deficient regions within the matrix of ZnO. 20,22 The high binding energy peak of O 1s-3 may be ascribed to a specific chemisorbed oxygen such as the adsorbed H 2 O or OH − type species on the surface of the film.…”
Section: Resultsmentioning
confidence: 99%
“…2 shows the XPS spectrum obtained from a ZnO film processed at a plasma power of 100 W, plasma pressure of 57.5 mTorr and plasma exposure time of 2 s. The O1s and the Zn2p 3/2 peaks are observed at about 531 eV and 1022 eV, respectively. The stoichiometry is determined from the O1s and Zn2p 3/2 photoelectron peaks as shown in this work [22]. The C1s peak which is the carbon impurity appeared at 285 eV for all samples deposited.…”
Section: Resultsmentioning
confidence: 99%