2001
DOI: 10.1023/a:1017552302379
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Abstract: Crack patterns of 53 nm and 103 nm thick silicon oxide coatings on poly(ethylene terephthalate) films are analyzed under equibiaxial stress loading, by means of a bulging cell mounted under an optical microscope with stepwise pressurization of film specimens. The biaxial stress and strain are modeled from classical elastic membrane equations, and an excellent agreement is obtained with a finite element method. In the large pressure range, the derivation of the biaxial strain from force equilibrium consideratio… Show more

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Cited by 39 publications
(11 citation statements)
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“…These peaks are consistent with the presence of both PDMS and PEI. Next, adsorbing a monolayer of negatively charged silica nanoparticles onto the positively charged PEI caused the mass/charge peak at 40 to disappear entirely ( Figure 1 d), which is consistent with a surface containing [ 28 ] Si but no PEI. Finally, upon stretching the PDMS (Δ L / L = 45% ) , (Figure 1 f).…”
Section: Doi: 101002/adma201306335supporting
confidence: 54%
See 1 more Smart Citation
“…These peaks are consistent with the presence of both PDMS and PEI. Next, adsorbing a monolayer of negatively charged silica nanoparticles onto the positively charged PEI caused the mass/charge peak at 40 to disappear entirely ( Figure 1 d), which is consistent with a surface containing [ 28 ] Si but no PEI. Finally, upon stretching the PDMS (Δ L / L = 45% ) , (Figure 1 f).…”
Section: Doi: 101002/adma201306335supporting
confidence: 54%
“…Similar variability was observed when thin coatings were cracked using uniaxial strain. [26][27][28] Fourth, the crack should not only allow a material to deposit but also impart some degree of selectivity. Ideally, the crack should control the size, shape, and crystallographic orientation of the material that deposits.…”
Section: Doi: 101002/adma201306335mentioning
confidence: 99%
“…46 Generally, cracks always result from releasing internal stress and the mismatch of thermal expansion coefficients between layers can lead to the generation of biaxial interfacial stress during hightemperature process, which brings about the device failure by delamination. 47 The SiO x layer prepared here at room temperature not only avoids the interface mismatch but also guarantees a low internal stress inherently due to its mass increment process and relatively low modulus (Figure S13) compared with the sol−gel process. 15 Additionally, the recently reported typical flexible performance of SiO x -based RRAMs via the PVD method is also listed in Table 1.…”
Section: ••mentioning
confidence: 99%
“…This stress-induced cracking is critical because it may lead to device degradation. There are several different approaches for mechanical testing of thin films on flexible substrates, such as tensile test [5,6], bulge test [7], and bending test [8,9]. In-situ characterization of the film cracking is challenging.…”
Section: Introductionmentioning
confidence: 99%