X-ray study of near-surface strain in implanted silicon

Larson, B. C.; Barhorst, J. F.; Goldenberg, S.S.

doi:10.1107/s0108767381092064

Acta Cryst Sect A

1981

DOI: 10.1107/s0108767381092064

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X-ray study of near-surface strain in implanted silicon

B. C. Larson¹,

J. F. Barhorst²,

S.S. Goldenberg³

Abstract: graphic contrast analysis. In some crystals inclusion like features were observed in the topographs. These are apparently inclusions of the flux materials.

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X-ray study of near-surface strain in implanted silicon

Abstract: graphic contrast analysis. In some crystals inclusion like features were observed in the topographs. These are apparently inclusions of the flux materials.

This publication either has no citations yet, or we are still processing them

See others like this or search for similar articles

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