“…The advantage of this approach is that the substrate distortions and uncertainties are irrelevant. 15 In this letter, we studied the anisotropic crystallographic characteristics of m-plane GaN films grown on LiAlO 2 ͓LAO͔͑100͒ substrates. Williamson-Hall ͑W-H͒ plots reveal different tilts and lateral correlation lengths along the two orthogonal directions.…”
mentioning
confidence: 99%
“…The interplanar spacing normal to the interface can be obtained from symmetric reflection; that in the plane of the interface can be obtained by comparing the positions of two reflections. 15 To the situation of m-plane GaN, it should define the interplanar spacings in GaN layer as an orthogonal set d z and d x in the plane of the interface and d y normal to the interface plane. These parameters can be calculated from the symmetric and asymmetric RSMs of several reflections.…”
“…The advantage of this approach is that the substrate distortions and uncertainties are irrelevant. 15 In this letter, we studied the anisotropic crystallographic characteristics of m-plane GaN films grown on LiAlO 2 ͓LAO͔͑100͒ substrates. Williamson-Hall ͑W-H͒ plots reveal different tilts and lateral correlation lengths along the two orthogonal directions.…”
mentioning
confidence: 99%
“…The interplanar spacing normal to the interface can be obtained from symmetric reflection; that in the plane of the interface can be obtained by comparing the positions of two reflections. 15 To the situation of m-plane GaN, it should define the interplanar spacings in GaN layer as an orthogonal set d z and d x in the plane of the interface and d y normal to the interface plane. These parameters can be calculated from the symmetric and asymmetric RSMs of several reflections.…”
“…15 Figure 2͑b͒ shows the bending of the FS films as a function of the difference in the in-plane lattice parameters of the Ga and N face sides for all the samples. A clear reduction of the bending in the annealed samples can be seen although it remains significant in all the FS films.…”
The effect of high-temperature high-pressure annealing on the residual strain, bending, and point defect redistribution of freestanding hydride vapor phase epitaxial GaN films was studied. The bending was found to be determined by the difference in the in-plane lattice parameters in the two faces of the films. The results showed a tendency of equalizing the lattice parameters in the two faces with increasing annealing temperature, leading to uniform strain distribution across the film thickness. A nonmonotonic behavior of structural parameters with increasing annealing temperature was revealed and related to the change in the point defect content under the high-temperature treatment.
“…The correlation length and tilt are related to the parallel and radial component of the elliptically-shaped Bragg peak (see inset, Fig. 1a) [13]. For this particular film, the long-axis of the ellipse is essentially normal to the radial direction, which indicates a long lateral correlation length.…”
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Journal of Crystal
AbstractThe strain relaxation behavior for a series of GaN y As 1Ày films was studied by transmission electron microscopy, high-resolution X-ray diffraction and atomic force microscopy. Samples consisting of 200 nm thick GaN y As 1Ày epitaxial layers with 0:025pyp0:065 (i.e. various misfit strain) were grown on (1 0 0) GaAs substrates by molecular beam epitaxy at 460 1C. The GaN 0.025 As 0.975 film shows no misfit dislocations and remains pseudomorphic well beyond the Matthews and Blakeslee's critical thickness, which can be explained by the high activation energy for a homogeneous dislocation nucleation at a smooth film surface. In samples with large N content (y40:04) relaxation of the built-in strain proceeds through morphological changes involving formation of surface cusps, followed by stacking faults and microtwins. The surface nucleation of 901 partial dislocations is shown to be feasible at the low growth temperature in the presence of cusps due to the stress concentration. The surface roughness is anisotropic between the two /011S direc...
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