passivation has been a topic of intensive interest for both fundamental science and practical technologies. [5] Perhaps the most utilized description of low-temperature passivating film formation is the phenomenological model by Cabrera and Mott, noting that virtually all metals show a similar behavior under ambient conditions. [6] That is, metals display an initial stage of rapid oxide growth, followed by a stage of significantly slower growth to a limiting thickness in the nanometer range. [7] Cabrera-Mott theory stipulates that such self-limiting oxide growth results from a self-generated electric field, [6] where the field-enhanced ionic transport accelerates the initial oxidation but is rapidly attenuated with increasing thickness of the oxide film. [5a,8] However, the atomiclevel and microscopic mechanism underlying such a self-limiting oxide growth behavior have been a longstanding unsettled question since the development of the Cabrera-Mott theory back in 1940s. [6] This is because the formation of a passivating layer requires atomic exchanges between the surface and subsurface regions and directly investigating passivation-induced structure dynamics at the atomic scale has been a major challenge for difficulties in atomically and concurrently resolving the structure evolution in both the surface and subsurface regions. Understanding passivation phenomena has also been complicated by the presence of surface defects and the challenge in directly probing the surface-subsurface interactions at the defective sites.Directly probing the atomic processes governing the oxygen uptake induced structural transformation of the metallic lattice into a passivating layer of amorphous oxide has not been achieved. This is because the insulating nature of the oxides prohibits the use of many surface-sensitive techniques based on the detection of charged particles such as electrons and ions to both spatially and temporally monitor oxide growth at the buried oxide/metal interfaces and across the entire oxide film. The ultrathin nature of the passivating oxide film also hinders the use of bulk materials science tools to probe the surface and interface regions because of the close proximity. Transmission electron microscopy (TEM) is not subject to such limitations and is capable of providing atomic-scale information for both the surface and subsurface regions at the same time. [9] Particularly, the developments in TEM have allowed temperature-, pressure-, and time-resolved imaging of gas-solid reaction dynamics. [10] By employing a dedicated environmental TEM equipped with Despite the ubiquitous presence of passivation on most metal surfaces, the microscopic-level picture of how surface passivation occurs has been hitherto unclear. Using the canonical example of the surface passivation of aluminum, here in situ atomistic transmission electron microscopy observations and computational modeling are employed to disentangle entangled microscopic processes and identify the atomic processes leading to the surface passivation. Ba...