X-ray multilayer monochromator with enhanced performance

André, Jean‐Michel; Benbalagh, Rabah; Barchewitz, R.; Ravet, M. F.; Raynal, Alain; Delmotte, F.; Bridou, Françoise; Julie, G; Bosseboeuf, Alain; Laval, R.; Soullié, G.; Remond, C.; Fialin, Michel

doi:10.1364/ao.41.000239

Cited by 14 publications

(7 citation statements)

References 21 publications

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“…Although the 0th order bandwidth was reduced by a factor of two to five, 143-145 the achieved efficiency was also reduced 149 by 38% to even 85% relative to a standard ML mirror. 143,144 Kozhevnikov et al then identified the single-order operating regime for the multilayer grating. 146,147 In this scheme, only one diffraction order will be excited and the reflected power is concentrated in this single order, if the angular width of the zeroth or higher order peak is much smaller than the angular distance between the adjacent orders.…”

Section: Single Order Lamellar Multilayer Gratingmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Section: Single Order Lamellar Multilayer Gratingmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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“…Multilayer gratings or etched multilayers (EMs), consisting in a periodic stack of bilayers with nanometric thickness laterally etched according to a periodic pattern, belong to this class of two‐dimensional photonic crystals that has opened up new ways for X‐ray optics. Thus, lamellar (or laminar) multilayer gratings can be used as efficient polychromators and are also implemented as improved monochromators with respect to mere multilayer Bragg mirrors for the soft X‐ray domain . Recently, we have demonstrated that EMs can be used as dispersive element of curved crystal‐soft X‐ray spectrometer.…”

Section: Introductionmentioning

confidence: 99%

X-ray quasi-lamellar etched multilayers: analysis by coupled-mode theory

2013

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An etched multilayer (EM) is a two-dimensional structure obtained by etching a periodic multilayer following the profile of a grating. Generally a laminar grating shape, i.e. with a rectangular shape, is desired. However, we observe that different EM give different diffraction efficiency curves. We implement the coupled-mode theory to calculate the diffraction pattern of the EM as a function of the shape of the etching profile. Thus, we try to correlate the variability of the experimental reflectivity curves to various shapes of the profiles, rectangular and trapezoidal, and the corresponding simulated reflectivity curves.Keywords: X-ray mirrors, Multilayers, Gratings, Reflectivity, Coupled-mode theory Highlights: Coupled-mode theory is used to calculate the diffraction pattern of the etched multilayers and then compared to experiments. Reflectivity measurements show different curve shapes depending on the sample preparation. This is explained by the various shapes of the etching profile and partially confirmed by the calculations.2

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“…The multilayer gratings (MGs), consisting of a periodic stack of bilayers with nanometric thickness laterally etched according to a periodic pattern, belong to this class of 2D photonic crystals that has opened up new ways for x-ray optics. Thus lamellar multilayer gratings (LMGs) can be used as efficient polychromators [1] and can also be implemented as improved monochromators with respect to mere multilayer Bragg mirrors for the soft-x-ray domain [2][3][4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Analysis by Coupled-Mode Theory of X-ray Multilayer Gratings

André

Jonnard

Guen

2013

UVX 2012 - 11e Colloque Sur Les Sources Cohérentes Et Incohérentes UV, VUV Et X ; Applications Et Développements Récents

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Abstract. Multilayer gratings developed since the end of the ninethies are now used for various purposes in x-uv optics: polychromator, narrow bandpass monochromators. . . We have implemented the Coupled-Mode Theory (CMT) to calculate the performances of these devices (efficiencies, bandwidths. . . ) especially for quasi-lamellar gratings with different shapes of the multilayer pitch. We have fabricated such gratings and compared CMT calculations with measurements obtained at the BEAR beamline of ELETTRA.

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X-ray multilayer monochromator with enhanced performance

Cited by 14 publications

References 21 publications

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

X-ray quasi-lamellar etched multilayers: analysis by coupled-mode theory

Analysis by Coupled-Mode Theory of X-ray Multilayer Gratings

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