X-ray microscopy using reflection targets based on SEM with tungsten filament

Liu, Junbiao; Ma, Yutian; Zhao, Weixia; Niu, Geng; Chu, Mingzhang; Yin, Bohua; Han, Li; Liu, Baodong

doi:10.1117/12.2241728

Cited by 2 publications

(1 citation statement)

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“…SEM-based CT is a powerful technique to image specimen morphology in 3D. Through raising interest in the technique over the last years different laboratory-based systems are developed [1][2][3][4] . Since the system can be used as an add-on, it allows to extend SEM modalities like electron imaging, EDX analysis or EBSD by nano-CT.…”

Section: Introductionmentioning

confidence: 99%

Correlative microscopy using SEM based nano-CT

Fell,

Lutter,

Pauly

et al. 2023

X-Ray Nanoimaging: Instruments and Methods VI

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Besides electron imaging in Scanning Electron Microscopy (SEM), techniques like Energy Dispersive X-ray spectroscopy (EDX) or Electron Backscatter Diffraction (EBSD) are widely established. With integration of a target holder and a pixelated x-ray detector, x-ray Computed Tomography (CT) in SEM can be realized and extends the modalities of materials characterization in one instrument. For nano-CT mode, an electron beam is focused on a suitable target leading to x-ray emission. While passing through a specimen, x-rays are differently attenuated depending on their material properties and detected by a direct converting x-ray detector afterward. Presented is a SEM-based nano-CT called XRM-II nanoCT and different applications of correlative microscopy using electron imaging, energy dispersive x-ray spectroscopy and CT. Besides multiscale investigation on materials for fuel cells and electrolysers by 3D visualization with micro- and nano-CT, nano-CT characterization of a catalytic converter with additional chemical analysis is depicted. At last, time-resolved imaging of morphology changes in an annealed Al alloy using nano-CT is presented. Results show grain coarsening as well as precipitations in the range of 200 – 1200 nm.

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Section: Introductionmentioning

confidence: 99%