2005
DOI: 10.1002/sia.2105
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X‐ray microanalysis of real materials using Monte Carlo simulations

Abstract: In this paper, new results of Monte Carlo simulations are presented in the context of X-ray microanalysis in the scanning electron microscope and the variable pressure scanning electron microscope. For the analysis of bulk samples in the scanning electron microscope, the simulation of X rays emitted from porous materials is covered. Modeling of electron scattering in gases is also presented in the context of X-ray microanalysis in variable pressure scanning electron microscopy. Finally, characterization of ele… Show more

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Cited by 22 publications
(8 citation statements)
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“…As emphasized by Tanuma, Powell, and Penn in the quoted paper, the electron stopping power is a relevant quantity in radiation dosimetry and in modeling of electron transport in matter today. In particular, the stopping power has recently been utilized in Monte Carlo simulations of electrons traveling in solid targets with the aim to model processes related to electron-probe microanalysis, Auger-electron spectroscopy, and scanning electron microscopy (for example see Refs [3][4][5][6][7][8][9]). …”
Section: Monte Carlomentioning
confidence: 99%
“…As emphasized by Tanuma, Powell, and Penn in the quoted paper, the electron stopping power is a relevant quantity in radiation dosimetry and in modeling of electron transport in matter today. In particular, the stopping power has recently been utilized in Monte Carlo simulations of electrons traveling in solid targets with the aim to model processes related to electron-probe microanalysis, Auger-electron spectroscopy, and scanning electron microscopy (for example see Refs [3][4][5][6][7][8][9]). …”
Section: Monte Carlomentioning
confidence: 99%
“…In general smaller particles require smaller steps and lower accelerating voltage, and light elements can be analyzed with higher spatial resolution at low accelerating voltage. The best approach is to use Monte Carlo simulation software (Gauvin & Lifshin, 2004) to select proper accelerating voltage to minimize overlapping of generated X-ray volumes. We commonly use step sizes of 0.3 μm with 8 kV, up to 1 μm with 20 kV, or even larger in the case of coarse grained phases.…”
Section: Methodsmentioning
confidence: 99%
“…Declared by this method, the P/B is constant at any location on the rough surface, and that this ratio is the same as that of bulk material of the same composition having a flat surface. However, using Monte Carlo simulations, Gauvin and Lifshin [11] showed that the P/B is not constant for the rough surfaces. Gauvin demonstrated that the P/B has some weaknesses.…”
Section: Introductionmentioning
confidence: 99%