1993
DOI: 10.1116/1.578628
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X-ray fluorescence measurements of x-ray absorption near edge structure at the Si, P, and S L edges

Abstract: High-resolution (≤0.2 eV) x-ray absorption near edge structure (XANES) spectra have been recorded at the Si, P, and S 2p edges of several compounds using microchannel plates to detect the ultrasoft x-ray fluorescence after 2p excitation or ionization. The fluorescence yield (FY) XANES of SiO2, Si, InP, FeS2, and Na2S2O3 are of at least as good quality as the XANES recorded using total electron yield (TEY), despite the extremely small fluorescence yield. The FY spectra obtained show two significant advantages o… Show more

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Cited by 86 publications
(39 citation statements)
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“…Figure 18 shows the PEY obtained from bulk Si (spectrum (a)) and passivated Si NCs (spectrum (b)) at the Si L 2,3 edge. Data for bulk silicon are in agreement with previous work [80,81]. However, the absorption spectrum from the NCs is remarkably different from both the bulk and what would be expected from a consideration of the theoretically determined unoccupied density of states (DOS) in silicon clusters containing a few tens of atoms [82,83].…”
Section: Xas Of Silicon Nanostructuressupporting
confidence: 81%
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“…Figure 18 shows the PEY obtained from bulk Si (spectrum (a)) and passivated Si NCs (spectrum (b)) at the Si L 2,3 edge. Data for bulk silicon are in agreement with previous work [80,81]. However, the absorption spectrum from the NCs is remarkably different from both the bulk and what would be expected from a consideration of the theoretically determined unoccupied density of states (DOS) in silicon clusters containing a few tens of atoms [82,83].…”
Section: Xas Of Silicon Nanostructuressupporting
confidence: 81%
“…This behavior is in contrast to the blue shift that has been previously reported for porous Si [81,95], SiO 2 /Si superlattices [96], and for Si nanoclusters [28] and attributed to quantum confinement. A red shift has, however, been reported for 2 and 3 nm diameter silicon clusters formed upon annealing SiO 2 superlattices by Zimina et al [97], although changes in the absorption spectrum were much less pronounced than those reported here.…”
Section: Xas Of Silicon Nanostructurescontrasting
confidence: 53%
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“…TEY spectra is more surface sensitive compared to FY spectra [38]. The sampling depths of TEY and FY at the P K-edge are 5 nm and *50 nm respectively [40,41]. A strong single intense peak is characteristic of the phosphorus Kedge, and is attributed to the transition of a phosphorus 1s electron to an empty p-like antibonding state.…”
Section: P K-edge and Fib/sem Experimentsmentioning
confidence: 97%
“…Phosphorus K-edge spectra were obtained at the DCM beam line, which covers an energy range of 1,500-4,000 eV, with a resolution of 0.8 eV. The phosphorus K-edge spectra were both recorded in the total electron yield (TEY) and fluorescence yield (FY) modes for surface and bulk sensitivity [42], respectively. Phosphorus L-edge spectra were collected at the Grasshopper beam line, which covers an energy range of 70-900 eV, with a resolution of 0.2 eV.…”
Section: Xanes Spectroscopymentioning
confidence: 99%