X-ray deconvolution microscopy

Ehn, Sebastian; Epple, F. M.; Fehringer, Andreas; Pennicard, David; Graafsma, H.; Noël, Peter B.; Pfeiffer, Franz

doi:10.1364/boe.7.001227

Cited by 10 publications

(9 citation statements)

References 26 publications

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“…Super-resolution image reconstruction 30 was performed according to the following model: the intensity , generated by the one dimensional lens, is recorded by low resolution detector, where x and y are the pixel coordinates with a pixel size of d . Assuming that a sample is scanned through the focused beam in a vertical direction (y) with N steps which leads to an intensity change in the detector plane due to absorption by the sample.…”

Section: Methodsmentioning

confidence: 99%

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Super-Resolution Scanning Transmission X-Ray Imaging Using Single Biconcave Parabolic Refractive Lens Array

Mamyrbayev

Ikematsu

Meyer

et al. 2019

Sci Rep

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A new super resolution imaging technique which potentially enables sub-µm spatial resolution, using a detector of pixels much larger than the spatial resolution, is proposed. The method utilizes sample scanning through a large number of identical X-ray microprobes periodically spaced (the period corresponds to a multiple of the pixel size), which reduces drastically the scanning time. The information about the sample illuminated by the microprobes is stored by large detector pixels. Using these data and sample position information, a super-resolution image reconstruction is performed. With a one-dimensional (1D) high aspect ratio nickel single lens array designed for theoretically expected sub-µm microprobes at 17 keV and fabricated by deep X-ray lithography and electroforming technique, 2 µm X-ray microprobes with a period of 10 µm were achieved. We performed a first experiment at KARA synchrotron facility, and it was demonstrated that the smallest structure of a test pattern with a size of 1.5 µm could be easily resolved by using images generated from a detector having a pixel size of 10.4 µm. This new approach has a great potential for providing a new microscopic imaging modality with a large field of view and short scan time.

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Section: Methodsmentioning

confidence: 99%

“…The first demonstration of this technique was realized by the raster-scanning of a sample in front of the single-photon counting LAMBDA detector without the use of optical elements. In this work, the spatial resolution of 10 µm was achieved 30 .…”

Section: Introductionmentioning

confidence: 99%

Super-Resolution Scanning Transmission X-Ray Imaging Using Single Biconcave Parabolic Refractive Lens Array

Mamyrbayev

Ikematsu

Meyer

et al. 2019

Sci Rep

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“…is the raster scanning of the sample in two directions [26]. Figure 5 shows the sub-pixel image of the Siemens star obtained from the two line scans performed.…”

Section: Application Of the 2d Multi-lens Array For 2d Sub-pixel Resomentioning

confidence: 99%

Development of an Array of Compound Refractive Lenses for Sub-Pixel Resolution, Large Field of View, and Time-Saving in Scanning Hard X-ray Microscopy

et al. 2020

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A two-dimensional array of compound refractive lenses (2D array of CRLs) designed for hard X-ray imaging with a 3.5 mm2 large field of view is presented. The array of CRLs consists of 2D polymer biconcave parabolic 34 × 34 multi-lenses fabricated via deep X-ray lithography. The developed refractive multi-lens array was applied for sub-pixel resolution scanning transmission X–ray microscopy; a raster scan with only 55 × 55 steps provides a 3.5 megapixel image. The optical element was experimentally characterized at the Diamond Light Source at 34 keV. An array of point foci with a 55 µm period and an average size of ca. 2.1 µm × 3.6 µm was achieved. In comparison with the conventional scanning transmission microscopy using one CRL, sub-pixel resolution scanning transmission hard X-ray microscopy enables a large field of view and short scanning time while keeping the high spatial resolution.

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“…They increased the resolution to 1.67 times when using a single-photon processing system with pixel size of 55 mm Â 55 mm and micro-scanning step size of 1/3 pixel size. Ehn et al studied the influence of the micro-scanning step size on the MTF and applied it to X-ray computed tomography (CT) imaging (Ehn et al, 2016;Ballabriga et al, 2013;Pennicard et al, 2013). Lu ¨bcke et al (2019) used a synchrotron radiation soft X-ray detector (effective pixel size: 7.2 mm Â 7.2 mm) to increase the image spatial resolution to 1.3 times by uncontrolled micro-scanning with a CCD chip.…”

Section: Introductionmentioning

confidence: 99%

Synchrotron radiation X-ray imaging with large field of view and high resolution using micro-scanning method

Sun¹,

Wang²,

Zhang³

et al. 2022

J Synchrotron Rad

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In synchrotron radiation X-ray imaging, the imaging field of view and spatial resolution are mutually restricted, which makes it impossible to have both a large field of view and high resolution when carrying out experiments. Constructing an oversampled image through the micro-scanning method and using the deconvolution algorithm to eliminate the point spread function introduced by pixel overlap can increase the resolution under a fixed imaging field of view, thereby improving the ratio of the field of view to the spatial resolution. In this paper, numerical simulation and synchrotron radiation experiments are carried out with a different number of micro-scanning steps. In numerical simulation experiments only affected by the image pixel size, as the number of micro-scanning steps increases, the ability of the oversampled image with deconvolution to improve the resolution is stronger. The achievable resolution of the oversampled image with deconvolution is basically the same as that of the sample image. In the synchrotron radiation experiments, the resolution of the oversampled image with deconvolution in the 2 × 2 mode is significantly improved. However, as the number of micro-scanning steps increases, the resolution improvement is limited, or even no longer improved. Finally, by analyzing the results of numerical simulation and synchrotron radiation experiments, three factors (four other factors affecting the resolution besides the camera resolution, translational accuracy of micro-scanning, and the signal-to-noise ratio of projections) affecting the micro-scanning method are proposed and verified by experiments.

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X-ray deconvolution microscopy

Cited by 10 publications

References 26 publications

Super-Resolution Scanning Transmission X-Ray Imaging Using Single Biconcave Parabolic Refractive Lens Array

Super-Resolution Scanning Transmission X-Ray Imaging Using Single Biconcave Parabolic Refractive Lens Array

Development of an Array of Compound Refractive Lenses for Sub-Pixel Resolution, Large Field of View, and Time-Saving in Scanning Hard X-ray Microscopy

Synchrotron radiation X-ray imaging with large field of view and high resolution using micro-scanning method

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