X-ray analysis of thin films and multilayers

Abstract

X-ray diffraction is sensitive to thin films of atomic dimensions to thicknesses of many tens of microns, by virtue of the x-ray wavelengths employed and the very high diffractionspace resolutions attainable. X-ray methods are generally non-destructive, in that sample preparation is not required, and they can provide a very appropriate route to obtain structural information on thin films and multilayers. Analysis can be performed across the whole spectrum of material types from perfect single crystals to amorphous materials. The choice of the x-ray diffraction analysis procedure depends on the quality of the structural form and therefore this review has been organized to reflect this. Following a description of the various material types, some typically important material parameters have been given arising from the application areas. These material parameters relating to the structure are then categorized into macroscopic and microscopic properties which can then be further subdivided and correlated to the most appropriate analysis method. It is clear from this that x-ray analysis covers the whole range and from this the recent developments will become clear. It is intended therefore that the reader is not compelled to read from beginning to end, but rather be able to find the structural parameter of interest to him/her in a simple way and from that discover the various approaches to its determination.

Mechanistic study of plasma damage of low k dielectric surfaces

“…The XRR technique uses a highly collimated and monochromatic x-ray beam to probe the sample surface at a low angle (0°-5°) and the reflected beam intensity is analyzed. In a typical XRR curve, the critical angle provides a measure of the film density; the period of fringes measures the film thickness; and the slope measures the roughness [22]. In our studies, XRR curves were fit with X'Pert software to deduce the film density after different plasma treatments in the Oxford RIE chamber.…”

The Effects of Heat Treatment on the Electrochemical Properties and Corrosion of Aluminium Alloy AA8011 in an Aqueous Acid Media

“…Further the effects of heat treatment can be elucidated by considering the degree of lattice distortion of the crystallites in the samples. The lattice distortion (e) is given by Fewster, [19]( eq. 2) The corrosion behaviours of the heat treated specimens can be related to the features of the intermetallic particles arising from the heat treatment as illustrated in the XRD spectra (Fig.…”

Substructural Properties and Anisotropic Peak Broadening in Zn1−x Mn x Te Films Determined by a Combined Methodology Based on SEM, HRTEM, XRD, and HRXRD

“…[17] Consequently the obtained values by SEM can only be considered as values related to the overall size of a grain. If they have a single or polycrystalline structure, it can be only assessed by XRD and/or HRTEM measurements, as we will study in Section III-D.…”