WR‐3.4 multi‐mode waveguide module with single‐chip‐integrated array circuits

Abstract

This paper introduces a WR‐3.4 waveguide module that contains an array of circuits fabricated on a single chip with an area of 3 × 0.75 mm2. The array comprises ten elements, each containing a straight differential thru line connecting input and output waveguide transitions. Modifications to the edge element design are intended to produce perfect cell‐to‐cell symmetry by providing amplitude and phase balances for all array elements. The measurements show that the array module possesses an insertion loss of around 3.5 dB in the frequency range of 220–300 GHz. This result represents an increase of 2.5 dB compared to an empty waveguide module, displaying similarity to the performance of single‐element modules.