WITHDRAWN: Ultra-Precision Polishing Method of Polymer-Derived Amorphous SiAlCN Ceramics

Abstract

The amorphous and heterogeneous microstructures of polymer-derived ceramics (PDCs) make it challenging to uniformly polish them without the appearance of obvious polishing defects. In this study, the surface characteristics of polymer-derived silicoaluminum carbonitride (SiAlCN) ceramics were investigated after mechanical polishing and chemical–mechanical polishing (CMP). The results showed the generation of polishing defects including scratches, pits, and comet tails after mechanical polishing; nonetheless, the surface quality was largely improved after CMP, providing an ultra-smooth surface (Ra = ~0.25 nm). The evolution of the surface morphology was characterized in detail and X-ray photoelectron spectroscopy was used to analyze the characteristics of chemical bond before and after the CMP. The polishing slurry dominated the corrosion process during CMP, inducing the oxidation of the SiCxNy phase; nonetheless, the so-formed oxidation products and carbon phase were removed by mechanical action. The obtained ultra-high smooth surface can promote practical application in the field of PDCs-based sensors.