2014
DOI: 10.1109/jsen.2014.2326593
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Width-Modulated Microfluidic Columns for Gas Separations

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Cited by 16 publications
(8 citation statements)
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“…Over the past couple of decades, significant progress has been made in column miniaturization using MEMS technology and in their stationary phase coating . The advantages of the MEMS columns include batch fabrication and lower cost, fast analysis time with less power consumption, and decreasing the dead volume through monolithic integration with other components of μGCs. Using columns fabricated by a deep reactive ion etching technique, our group has developed multicapillary columns, width-modulated columns, semipacked columns, and recently, density-modulated semipacked columns. Our group, as well as others, have shown that successful separation of multianalyte gas mixtures can be achieved using 0.5–3 m long columns. , While the early reports showed columns with the number of theoretical plates close <2000 plates/m, over the past few years, more columns have been demonstrated that can achieve efficiencies beyond 5000 plates/m. ,, A comprehensive review of MEMS columns and future trends can be found in several review articles. ,, One example of significant research includes the report of the University of Illinois with 16 500 theoretical plates for 3 m-long microfabricated columns coated with OV-5 connected to 0.5 m long fused-silica tubes. The performance of this column was evaluated for the detection of 16 organic volatile compounds mixture .…”
Section: Introductionmentioning
confidence: 99%
“…Over the past couple of decades, significant progress has been made in column miniaturization using MEMS technology and in their stationary phase coating . The advantages of the MEMS columns include batch fabrication and lower cost, fast analysis time with less power consumption, and decreasing the dead volume through monolithic integration with other components of μGCs. Using columns fabricated by a deep reactive ion etching technique, our group has developed multicapillary columns, width-modulated columns, semipacked columns, and recently, density-modulated semipacked columns. Our group, as well as others, have shown that successful separation of multianalyte gas mixtures can be achieved using 0.5–3 m long columns. , While the early reports showed columns with the number of theoretical plates close <2000 plates/m, over the past few years, more columns have been demonstrated that can achieve efficiencies beyond 5000 plates/m. ,, A comprehensive review of MEMS columns and future trends can be found in several review articles. ,, One example of significant research includes the report of the University of Illinois with 16 500 theoretical plates for 3 m-long microfabricated columns coated with OV-5 connected to 0.5 m long fused-silica tubes. The performance of this column was evaluated for the detection of 16 organic volatile compounds mixture .…”
Section: Introductionmentioning
confidence: 99%
“…As a very thin thickness of the stationary phase film is assumed, the contribution of band-broadening due to diffusion in the stationary phase can be neglected. Therefore, the 3rd term in Equation (1) can be ignored to simplify the calculation [58]. An n -hexane was used to determine the average carrier gas velocity for calculating the corresponding HETP value of the GC columns.…”
Section: Resultsmentioning
confidence: 99%
“…Among the shape of the column and implemented pillars or none, some researchers tried different layouts including width modulation [40], multi-capillary [41], and partially buried channel [42].…”
Section: Geometrymentioning
confidence: 99%