Widely tunable torsional optical filter

Mateus, C.F.R.; Chang, Chih-Hao; Chrostowski, Lukas; Yang, Steven; Sun, Dongming; Pathak, R.; Chang-Hasnain, Connie J.

doi:10.1109/lpt.2002.1003104

Cited by 33 publications

(17 citation statements)

References 8 publications

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“…According to the analytical calculations, the maximum deflection is a square function of an applied voltage with a factor of 0.54946 considering the geometrical dimensions and the structural material (z max = 0.55V 2 , nm). The measured results are also confirmed by the fact that the tuning range for all photonic devices are limited by the actual allowed movement, which is the same with *1/3 of the gap (Mateus et al 2002).…”

Section: Deflection Performance Of the Microactuatorsupporting

confidence: 68%

“…The combination of growth methods, which are resulting in low stress epitaxial films, and design optimization will provide an excellent InP-based MEMS device for MOEMS applications (Ongkodjojo et al 2005). When the structure touches the substrate, the catastrophic discharge problem must be also avoided (Mateus et al 2002). In summary, our tunable filter's behavior is going from *1,390 to 1,070 nm in displacement towards the underlying substrate before the pull-in phenomenon occurs.…”

Section: Figmentioning

confidence: 98%

“…Some research groups have reported the InP-based MEMS structures for MOEMS applications (Mateus et al 2002;Irmer et al 2003;Boucart et al 2003;Datta et al 2004;Presser et al 2003). The InP-based MEMS devices including their finite element models (FEM) have been also reported in (Greek et al 1999;Bondavalli et al 2001;Shah et al 2004).…”

mentioning

confidence: 99%

“…This literature also reported some developments of the Fabry-Perot filters with a wavelength tuning range of 30-140 nm. Among others some MEMS devices, which have been used as Fabry-Perot filters for fiber-optic communications, are the torsional micromechanical structure (Mateus et al 2002), square plate, which is suspended by four cantilever beams (Greek et al 1999), bridge structure and square membrane, which are supported by two beams (Bondavalli et al 2001), small square membranes, which are supported by four cantilever beams and the split-beams , small square membrane, which is supported by four beams (Lin et al 2004), and small circular membrane, which is suspended by four beams (Irmer et al 2003;Leclercq et al 2000;Sagnes et al 2003).…”

mentioning

confidence: 99%

“…Based on our motivation for this research and the previous research works, we propose a novel InP-based microactuator, which is based on the global optimization method as reported in (Ongkodjojo and Tay 2002;Ongkodjojo et al 2005), and it is different with the previous ones (Mateus et al 2002;Irmer et al 2003;Boucart et al2003;Datta et al 2004;Presser et al 2003;Greek et al 1999;Bondavalli et al 2001;Shah et al 2004;Lin et al 2004;Leclercq et al 2000;Sagnes et al 2003). All the devices in the previously published reports are not based on the optimized designs.…”

mentioning

confidence: 99%

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Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

et al. 2007

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A novel InP-based microactuator, which is actuated by electrostatic means, has been proposed, designed, fabricated, and characterized for tuning applications in the 1.5 lm wavelength domains. Its structural design is based on the global optimization method. The tunable device is a big square membrane, which is supported by four identical cantilever beams. The three alternating layers Si 3 N 4 /SiO 2 as a distributed Bragg reflector (DBR) mirror, which were previously reported, have been formed on the top of the membrane. Based on the optical interferometric measurements, the proposed Fabry-Perot filter has demonstrated a maximum deflection of *321 nm with an applied voltage up to 12 V, an average sensitivity of *27 nm/V, a pull-in voltage of 12.7 V, and a release voltage of 10.7 V. It is also observed that its natural frequency is 88.4 kHz. This measured frequency implies that the tuning speed of our device is fast for optical operations within 0.01 ms. In addition, our device's mirror remains so flat with a good planarity of 0.07°, which is strictly required for the filter's optical performance. This optical performance can be achieved, when the micromachined structure has a tuning displacement up to *38 nm with a low tuning voltage up to 5 V. When compared with the finite element models (FEM), which were generated by the commercialized software, Coventor TM , our experimental results agree well in terms of the natural frequency, pull-in voltage and deflections. Thus, our tunable filter, which is based on the optimized design, enables better performances including reduced actuation voltages, large pull-in voltage, improved device reliability, and fast switching times. Our device can also quickly snap back to the original position. In addition, the undesired spring-softening effect has been reduced.

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Section: Deflection Performance Of the Microactuatorsupporting

confidence: 68%

Section: Figmentioning

confidence: 98%