Wide-temperature (up to 100 °C) operation of thermostable vanadium oxide based microbolometers with Ti/MgF2 infrared absorbing layer for long wavelength infrared (LWIR) detection

Lee, Hye Jin; Wang, Dasom; Kim, Tae Hyeong; Jung, Dong‐Won; Kil, Tae-Hyeon; Lee, Ki-Suk; Choi, Hyung-Jin; Baek, Seung Hyub; Yoon, Euijoon; Choi, Won Jun; Baik, Jeong Min

doi:10.1016/j.apsusc.2021.149142

Cited by 14 publications

(8 citation statements)

References 61 publications

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“…For enhanced MD performance based on photothermal membranes, the photoabsorption layers should be optimized. To optimize the solar energy absorption of the photothermal membranes, finite-difference time-domain (FDTD) method solution software with an RF module was used for two-dimensional finite element frequency domain simulation 21,29 . The materials and thicknesses of the metal/dielectric films were compared and optimized.…”

Section: Simulation Of Solar Absorption For Photothermal Membranesmentioning

confidence: 99%

Performance improvement of photothermal membrane distillation with a Ti/MgF2 photoabsorber enhanced robustness by plasma pretreatments

Song

Wang

Choi

et al. 2022

Preprint

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To meet the increasing global freshwater demand, desalination processes are a promising alternative technology for future water supply. Solar membrane distillation is a forward-looking desalination process, and it can minimize the use of electrical energy. We developed a photothermal membrane with high thermal performance and durability to reduce the energy loss caused by feed circulation for solar heating and reduce the environmental pollution caused by photothermal materials in the solar desalination process. The developed Ti/MgF2 membrane showed an absorbance of 83.3% of AM 1.5G at wavelengths of 280-2500 nm. The Ti/MgF2 membrane pretreated with Ar plasma exhibited a maximum temperature of 62.8°C and a temperature increase of approximately 40.5% compared to the unpretreated photothermal membrane under the 1 sun condition. Using the developed membrane, the water flux was improved by up to 26.9%, the performance ratio (PR) by 35.4%, and the thermal efficiency by 50.8% under the 1 sun condition. The produced permeate maintained high drinkability quality with a salt rejection rate of 99.9% or more. The developed photothermal membrane shows potential for application to membrane distillation (MD) using solar heat.

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Section: Simulation Of Solar Absorption For Photothermal Membranesmentioning

confidence: 99%

Performance improvement of photothermal membrane distillation with a Ti/MgF2 photoabsorber enhanced robustness by plasma pretreatments

Song

Wang

Choi

et al. 2022

Preprint

Self Cite

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“…However, microbolometers perform poorly in responsivity and detectivity [9] due to the low absorptivity of the pixel absorber. To solve this problem, Hye Jin Lee proposed to produce 5-stack Ti/MgF2 infrared absorbers based on thermally stable VO2 film, which demonstrates a fairly high absorptivity (~80%) regardless of the testing wavelength [10]. Kosasayama et al improved the infrared absorptivity from 50% to 80% in the wavelength range of 8 μm -12 μm by using the umbrella and independent infrared reflector structure in the presence of SiO2 absorber based on SOI diode [11].…”

Section: Introductionmentioning

confidence: 99%

Performance-Enhanced Polysilicon Microbolometer in CMOS Technology With a Grating Structure

Guo

Wang

et al. 2023

IEEE Photonics J.

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The resistive microbolometer fabricated by using CMOS technology can be monolithically integrated with the readout circuit but usually performs poorly in responsivity and detectivity. In this paper, the poly-Si microbolometer with Al grating structure is demonstrated in the standard CMOS process. The simulation results show that not only are surface plasmon polaritons generated at the interface of the Al grating and SiO2, Al grating also provides the infrared resonant cavity required for the absorber, which improves the responsivity of the microbolometer. According to the experimental results, the maximum detectivity of the microbolometer with the grating structure reaches up to 2.2610 9 cmHz 1/2 /W at 10 μm, which means an increase by 27.8% compared to the one without the Al grating. Moreover, the average detectivity of the microbolometer is also improved when the wavelength ranges from 7 μm to 13 μm. It is effortless to implement the proposed high-performance microbolometer in a unit structure based on CMOS technology, which is favorable to high-density array integration.

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“…It helps to monitor the human temperature, detect particular heat source or gases, strengthen surveillance conditions, observe the several physics phenomena, and examine heat facilities in buildings and infrastructures 1,2 , including the significant roles in military applications. This LWIR imaging also has become very important for autonomous driving 3,4 , and for convenient mobile or medical applications 5,6,7 . In order to expand the practical use of the LWIR imaging sensors on mobile and portable cases, it is very natural and essential that we have to contemplate especially two critical factors: a small form factor and high-quality images.…”

Section: Introductionmentioning

confidence: 99%

Meta-surface lens and deep learning process toward practical LWIR imaging devices

Seo,

Lee,

Yoon

et al. 2023

Infrared Sensors, Devices, and Applications XIII

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Wide-temperature (up to 100 °C) operation of thermostable vanadium oxide based microbolometers with Ti/MgF2 infrared absorbing layer for long wavelength infrared (LWIR) detection

Cited by 14 publications

References 61 publications

Performance improvement of photothermal membrane distillation with a Ti/MgF2 photoabsorber enhanced robustness by plasma pretreatments

Performance improvement of photothermal membrane distillation with a Ti/MgF2 photoabsorber enhanced robustness by plasma pretreatments

Performance-Enhanced Polysilicon Microbolometer in CMOS Technology With a Grating Structure

Meta-surface lens and deep learning process toward practical LWIR imaging devices

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