Wide Temperature Range and Low Temperature Drift Eddy Current Displacement Sensor Using Digital Correlation Demodulation

Ma, Tianxiang; Han, Yuting; Xu, Ya‐Qiong; Dai, Pengzhang; Shen, Honghai; Liu, Yunqing

doi:10.3390/s23104895

Cited by 3 publications

(4 citation statements)

References 19 publications

(19 reference statements)

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“…compensation; detection in sub nm range (b), [ 14 ] 40 mm

= 11 mm

∼ 30 °C

∼ 12 K 3000 ppm FS/K 120 μm/K Use of one excitation coil and two sensing coils (c), [ 18 ] 2 mm not specified

∼ 300 °C

∼ 320 K 1.3 mm: 170 ppm FS/K Compensation probe and a compensation plate to feedback exponential hysteresis temp. drift error (d), [ 30 ] ±2.5 mm not specified

= −40 to 50 °C

∼ 90 K ±13.7 ppm FS/K ±69 nm/K Use of a differential sensor probe to reduce the influence of temp. drift For small displacements: Reference (a) in Table A1 [ 8 ] focuses on distinguishing sub nm displacement variations and uses a reference coil to handle temperature drifts, achieving a high TS.…”

Section: Comparison Of Academic Research Studiesmentioning

confidence: 99%

“…However, the study lacks details on sensor dimensions, and it does not address how to correct exponential hysteresis temperature drift errors when the temperatures of the working probe and compensation probe are out of synchronization [ 18 ]. For temperature variations between 12 K and 320 K, (between reference (b) and (c)), reference (d), [ 30 ], develops a low-temperature-drift differential-digital demodulation sensor. The study also lacks details on sensor dimensions.…”

Section: Comparison Of Academic Research Studiesmentioning

confidence: 99%

“…For temperature variations between 12 K and 320 K, (between reference (b) and (c)), reference (d), [ 30 ], develops a low-temperature-drift differential-digital demodulation sensor. The study also lacks details on sensor dimensions.…”

Section: Comparison Of Academic Research Studiesmentioning

confidence: 99%

See 2 more Smart Citations

Eddy Current Position Measurement in Harsh Environments: A Temperature Compensation and Calibration Approach

Gruber,

Schweighofer,

Berger

et al. 2024

Sensors

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Eddy current displacement sensors (ECDSs) are widely used for the noncontact position measurement of small displacements (lift-offs). Challenges arise with larger displacements as the sensitivity of the ECDSs decreases. This leads to a more pronounced impact of temperature variations on the inductance and, consequently, an increased position error. Design solutions often rely on multiple coils, suitable coil carrier materials, and compensation measures to address the challenges. This study presents a single-coil ECDS for large displacement ranges in environments with high temperatures and temperature variations. The analysis is based on a sensor model derived from an equivalent circuit model (ECM). We propose design measures for both the sensing coil and the target, focusing on material selection to handle the impact of temperature variations. A key part of improving performance under varying temperatures includes model-based temperature compensation for the inductance of the sensing coil. We introduce a method to calibrate the sensor for large displacements, using a modified coupling coefficient based on field simulation data. Our analysis shows that this single-coil ECDS design maintains a position error of less than 0.2% full-scale for a temperature variation of 100K for the sensing coil and 110K for the target.

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“…compensation; detection in sub nm range (b), [ 14 ] 40 mm

= 11 mm

∼ 30 °C

∼ 12 K 3000 ppm FS/K 120 μm/K Use of one excitation coil and two sensing coils (c), [ 18 ] 2 mm not specified

∼ 300 °C

∼ 320 K 1.3 mm: 170 ppm FS/K Compensation probe and a compensation plate to feedback exponential hysteresis temp. drift error (d), [ 30 ] ±2.5 mm not specified

= −40 to 50 °C

Section: Comparison Of Academic Research Studiesmentioning

confidence: 99%

Section: Comparison Of Academic Research Studiesmentioning

confidence: 99%

See 1 more Smart Citation

Eddy Current Position Measurement in Harsh Environments: A Temperature Compensation and Calibration Approach

Gruber,

Schweighofer,

Berger

et al. 2024

Sensors

View full text Add to dashboard Cite

show abstract

“…According to the application method, eddy current sensors are divided into single-ended and differential types. In situations where installation space allows for it, the differential type achieves better linearity within a large measurement range [ 20 ].…”

Section: Introductionmentioning

confidence: 99%

Single-Ended Eddy Current Micro-Displacement Sensor with High Precision Based on Temperature Compensation

Xu,

Feng,

Liu

et al. 2024

Micromachines

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To measure the micro-displacement reliably with high precision, a single-ended eddy current sensor based on temperature compensation was studied in detail. At first, the principle of the eddy current sensor was introduced, and the manufacturing method of the probe was given. The overall design plan for the processing circuit was induced by analyzing the characteristics of the probe output signal. The variation in the probe output signal was converted to pulses with different widths, and then it was introduced to the digital phase discriminator along with a reference signal. The output from the digital phase discriminator was processed by a low-pass filter to obtain the DC component. At last, the signal was amplified and compensated to reduce the influence of temperature. The selection criteria of the frequency of the exciting signal and the design of the signal conditioning circuit were described in detail, as well as the design of the temperature-compensating circuit based on the digital potentiometer with an embedded temperature sensor. Finally, an experimental setup was constructed to test the sensor, and the results were given. The results show that nonlinearity exists in the single-ended eddy current sensor with a large range. When the range is 500 μm, the resolution can reach 46 nm, and the repeatability error is ±0.70% FR. Within the temperature range from +2 °C to +58 °C, the voltage fluctuation in the sensor is reduced to 44 mV after temperature compensation compared to the value of 586 mV before compensation. The proposed plan is verified to be feasible, and the measuring range, precision, and target material should be considered in real-world applications.

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Design and Parameter Optimization of Zero Position Code Considering Diffraction Based on Deep Learning Generative Adversarial Networks

Wang,

Luo,

2024

Nanomanuf Metrol

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Absolute measurement has consistently been the primary focus in the development of precision linear and angular displacement measurements. The scheme design of binary zero position codes is an important factor for absolute measurement. Designing and optimizing high-bit zero position codes with over 100 bits face considerable challenges. Simultaneously, the working parameters of zero position codes [unit code width (b), distance (d), and yaw angle (α)] remarkably affect their post-installation performance, particularly in absolute positioning and limit code application in multi-degree-of-freedom measurement schemes. This study addresses these challenges by proposing a design method for zero position codes that considers diffraction based on generative adversarial networks and aims to explore a design with increased efficiency and accuracy as well as optimization for high-bit zero position codes. Additionally, the tolerance range of zero positioning performance for each working parameter is examined. By leveraging the adversarial network structure, this study generates the optimization of a 150-bit code and processes the tests of the zero position code by using simulation results. The following working parameter ranges for code design are recommended on the basis of theoretical and experimental results: b greater than 10 μm, d and α within 1000 μm and 3490 μrad, and avoidance of intervals with sharp changes in the full width at half maximum. The proposed code design and parameter optimization lay a solid foundation for research and engineering applications in absolute measurement field and have considerable potential for generalization and wide applicability.

show abstract

Wide Temperature Range and Low Temperature Drift Eddy Current Displacement Sensor Using Digital Correlation Demodulation

Cited by 3 publications

References 19 publications

Eddy Current Position Measurement in Harsh Environments: A Temperature Compensation and Calibration Approach

Eddy Current Position Measurement in Harsh Environments: A Temperature Compensation and Calibration Approach

Single-Ended Eddy Current Micro-Displacement Sensor with High Precision Based on Temperature Compensation

Design and Parameter Optimization of Zero Position Code Considering Diffraction Based on Deep Learning Generative Adversarial Networks

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