Abstract:ZnGa2O4 films with different nitrogen impurity concentrations were deposited using radio frequency magnetron sputtering in an ammonia (NH3)/Ar gas mixture and were post-annealed at different temperatures, ranging from 600 °C to 900 °C, in NH3 atmosphere. The influence of ammonia partial pressure ratio and nitridation temperature on the microstructure, surface morphology, nitrogen doping profile, and optical properties has been investigated. The optical band gap of ZnGa2O4, under in-situ nitrogen-doping, decrea… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.