2021 IEEE Sensors 2021
DOI: 10.1109/sensors47087.2021.9639744
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Why Lasers Inject Perceived Sound Into MEMS Microphones: Indications and Contraindications of Photoacoustic and Photoelectric Effects

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Cited by 4 publications
(3 citation statements)
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“…• P(x,t) represents the photoacoustic signal generated by the material Our study extends and diverges from prior works like LightCommands by demonstrating that various materials, not just microphone diaphragms, can generate photoacoustic signals [CSF21,Cyr23]. Table 7 illustrates that semiconductor materials and plastics, often used in MEMS and ECM microphone diaphragms, have higher photoacoustic coefficients, making them more susceptible to laser stimulation.…”
Section: Photoacoustic Effectsupporting
confidence: 55%
“…• P(x,t) represents the photoacoustic signal generated by the material Our study extends and diverges from prior works like LightCommands by demonstrating that various materials, not just microphone diaphragms, can generate photoacoustic signals [CSF21,Cyr23]. Table 7 illustrates that semiconductor materials and plastics, often used in MEMS and ECM microphone diaphragms, have higher photoacoustic coefficients, making them more susceptible to laser stimulation.…”
Section: Photoacoustic Effectsupporting
confidence: 55%
“…Todorović [21] and several follow-up works by related researchers [22,23,24] investigated photoacoustic effects on silicon microstructures, noting several potential effects. Soon after Light Commands, we published a follow-up work indicating that photoacoustic effects on the diaphragm were the primary contributor to the laser injection signal [25]. While [25] showed the presence of photoacoustic phenomena, it did not provide a concrete model to describe the phenomena.…”
Section: Introductionmentioning
confidence: 99%
“…Soon after Light Commands, we published a follow-up work indicating that photoacoustic effects on the diaphragm were the primary contributor to the laser injection signal [25]. While [25] showed the presence of photoacoustic phenomena, it did not provide a concrete model to describe the phenomena. This model and understanding is a key part to developing future MEMS microphones that are resistant to laser signal injection.…”
Section: Introductionmentioning
confidence: 99%