Abstract:The ellipsometric image contrast for patterned film in whole visible range is simulated and analyzed in this article. By the Fresnel equation and the Jones Matrix, the characteristic wavelength selection method to enhance the image contrast is built. The ellipsometric reflected intensity of specific thin film is nulled into dark by rotating the phase angle of compensator and the azimuth angle of polarizer in whole visible range, which results in higher contrast between non-null and null images after the proper… Show more
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