Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WA-BRG)

Woo, Jong-Kwan; Cho, Jae Yoong; Boyd, Christopher; Najafi, K.

doi:10.1109/memsys.2014.6765563

Cited by 36 publications

(23 citation statements)

References 7 publications

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“…10 In this method, the two superimposed modes are separated using the orthogonality of the eigenmodes, and each mode is controlled independently by two phase-locked loops. 3,[11][12][13][14] In order to construct this type of gyroscope, a degenerate resonator is required. Furthermore, this type of gyroscope can be used as a rate integrating gyroscope that directly measures the rotation angle by reading the phase difference between the two modes.…”

Section: Introductionmentioning

confidence: 99%

“…10 Rate integrating gyroscopes are not temperature dependent like FM gyroscopes, and the measurement bandwidth can be infinity enlarged. 3,[11][12][13][14] In order to construct this type of gyroscope, a degenerate resonator is required. However, actual MEMS resonators have a degree of processing error, so they are not strictly degenerated.…”

Section: Introductionmentioning

confidence: 99%

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Automated Frequency and Quality-Factor Matching Method for Frequency Modulated / Rate Integrating Gyroscope

Tsukamoto

Tanaka

2019

IEEJ Trans. SM

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This paper reports an automated tuning method for a frequency modulated / rate integrating gyroscope (FM/RIG). The frequency and quality factor mismatches in a MEMS resonator cause the mode-coupling, thus degrade the accuracy of the gyroscope. The X-Y phase difference and amplitude ratio of driving signals are used as the tuning parameters for the mismatch compensation. An automated tuning method based on the relationship between those tuning parameters and mode-coupling terms were developed. Using the proposed method, the mode-coupling effect, which comes from the frequency and quality factor mismatch, could be 3 orders of magnitude smaller than the noncompensated one. K E Y W O R D Sdegenerated resonator, frequency modulated gyroscope, MEMS gyroscope, mode matching, rate integrating (whole angle) gyroscope Electr Eng Jpn. 2019;209:57-63.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Automated Frequency and Quality-Factor Matching Method for Frequency Modulated / Rate Integrating Gyroscope

Tsukamoto

Tanaka

2019

IEEJ Trans. SM

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“…2) Whole angle or rate-integrating mode [4] [10] [11] [12] when under gyro rotation, Coriolis forces provide transformation of vibration energy from primary to secondary modes and vice versa. Quadrature signal is the only one that is compensated for, to reduce CVG errors [11].…”

Section: Introductionmentioning

confidence: 99%

External Disturbances Rejection by Differential Single-Mass Vibratory Gyroscope

2017

APH

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Vibratory gyroscopes are now most applicable for such intelligent systems as drones, for motion stabilization, robots for accurate positioning of end-effectors, virtual reality systems to change image orientation with turn of a head and many others. During motion these systems can be exposed to mechanical shocks and vibrations. To provide required accuracy, working in such environmental conditions, gyroscopes shall have property of robustness to operating disturbances. This paper proposes differential mode of operation for single-mass vibratory gyroscope as a new operating mode that has higher rejection factors for different external disturbances like shocks and vibrations allowing meeting the requirements of many important applications in intelligent systems. Test results presented in this paper show excellent disturbance rejection properties of differential mode of operation in comparison to well-known rate mode. Despite excellent disturbance rejection results have been obtained for non MEMS gyro, the same results can certainly be obtained for MEMS gyro, too.

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“…The performance of the gyroscope and error sources are studied for rate-integrating and force-torebalance modes. In [4,5] similar approaches have been pursued to implement an RIG respectively on a bird-bath resonator with an angular gain of 0.25 and a quadruple mass gyroscope.…”

Section: Introductionmentioning

confidence: 99%

Disk resonator gyroscope with whole-angle mode operation

Taheri-Tehrani

Izyumin

et al. 2015

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings

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We present a demonstration of a whole-angle mode operation of a 0.6 mm single-crystal silicon disk resonator gyroscope (DRG). This device has a Q factor of ~80,000 and a resonant frequency of ~250 kHz and is fabricated in the epi-seal process. Discrete-time control algorithms for rate-integrating gyro operation were implemented based on Lynch's algorithm. Despite the fact that this DRG is over 5 orders of magnitude smaller than the 58 mm HRG, the device's error sources are shown to be accurately modeled by the basic error models developed by Lynch.

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Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WA-BRG)

Cited by 36 publications

References 7 publications

Automated Frequency and Quality-Factor Matching Method for Frequency Modulated / Rate Integrating Gyroscope

Automated Frequency and Quality-Factor Matching Method for Frequency Modulated / Rate Integrating Gyroscope

External Disturbances Rejection by Differential Single-Mass Vibratory Gyroscope

Disk resonator gyroscope with whole-angle mode operation

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