2012
DOI: 10.1016/j.optlaseng.2012.02.002
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White light interferometry for surface profiling with a colour CCD

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Cited by 53 publications
(31 citation statements)
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“…The traditional contact-detection method, for example, Micro-CMM [1,2] has not satisfied the requirements of fast, highly accurate, and non-destructive detection in the microelectronics manufacturing industry. Therefore, many scholars-both domestic and foreign-have proposed non-contact optical measurement methods, such as confocal microscopy [3,4], white-light interferometry [5,6], and microscopic fringe projection [7][8][9][10]. Even if the resolution of confocal microscopy and whitelight interferometry reach nano-level, the measurement range is merely several millimeters.…”
Section: Introductionmentioning
confidence: 99%
“…The traditional contact-detection method, for example, Micro-CMM [1,2] has not satisfied the requirements of fast, highly accurate, and non-destructive detection in the microelectronics manufacturing industry. Therefore, many scholars-both domestic and foreign-have proposed non-contact optical measurement methods, such as confocal microscopy [3,4], white-light interferometry [5,6], and microscopic fringe projection [7][8][9][10]. Even if the resolution of confocal microscopy and whitelight interferometry reach nano-level, the measurement range is merely several millimeters.…”
Section: Introductionmentioning
confidence: 99%
“…Authors accessed interference intensity information from the three channels of the colour CCD simulating three-wavelength measurements. This makes the data acquisition as simple as in single wavelength interferometry [6].…”
Section: Introductionmentioning
confidence: 99%
“…The white-light interferometry (WLI) is an attractive technique that is used for absolute measurements [24] and the measurement of the shape of objects [25], it allows the increase in the system operating range to overcome the fundamental problem that arises in conventional laser interferometry [26], and high resolution and dynamic range may be achieved [27].…”
Section: Introductionmentioning
confidence: 99%