“…[12] Using d-spacing values, the a and c lattice parameters of the Al x Ga 1-x N epilayers were calculated using the Jade 6.5 software package developed by Materials Data Inc. based on the XRD measurement results; the parameters are summarized in Table 1. The lattice parameters, i.e., a, c, and c/a ratios, and internal parameter u, which is defined as u = a 2 / (3c 2 ) + 0.25, [13] were calculated for the Al x Ga 1-x N epilayers based on the XRD measurement results and are summarized in Table 1. For an ideal wurtzite geometry, the u and c/a ratio values should be 0.375 and 1.633, respectively.…”