2017
DOI: 10.1039/c7cc05568d
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What [plasma used for growing] diamond can shine like flame?

Abstract: The gas-phase chemistry underpinning the chemical vapour deposition of diamond from microwave-activated methane/hydrogen plasmas is surveyed.

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Cited by 15 publications
(22 citation statements)
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“…Much of this complexity is now understood, however, through a combination of spatially resolved in-situ spectroscopic studies of the gas-phase composition as functions of process conditions and complementary plasma modelling. [31][32][33][58][59][60][61][62][63][64][65][66][67][68] Radicals containing just one carbon atom are recognised as key to CVD diamond growth and, of these, the methyl (CH3) radical is generally the most abundant in the immediate vicinity of the growing diamond surface (where Tgas is little more than half that in the plasma core). 69 As noted above, CVD diamond typically presents two principal low-index surfacesthe C (111) and C(100) surfacesand, given the high H-atom flux in the CVD environment, we here focus attention on the fully hydrogenated surfaces.…”
Section: The Cvd Growth Mechanismmentioning
confidence: 99%
“…Much of this complexity is now understood, however, through a combination of spatially resolved in-situ spectroscopic studies of the gas-phase composition as functions of process conditions and complementary plasma modelling. [31][32][33][58][59][60][61][62][63][64][65][66][67][68] Radicals containing just one carbon atom are recognised as key to CVD diamond growth and, of these, the methyl (CH3) radical is generally the most abundant in the immediate vicinity of the growing diamond surface (where Tgas is little more than half that in the plasma core). 69 As noted above, CVD diamond typically presents two principal low-index surfacesthe C (111) and C(100) surfacesand, given the high H-atom flux in the CVD environment, we here focus attention on the fully hydrogenated surfaces.…”
Section: The Cvd Growth Mechanismmentioning
confidence: 99%
“…The available experimental data do not give us enough evidence for a detailed comment on the atomic structure of the carbon nanoclusters. They could be heavy C n H z species formed in the cooler outer regions of plasma [46][47][48], or solid carbon particles [49,50] which are not thermally desorbed or etched by atomic hydrogen. Alternatively, these carbon nanoclusters could be nanoscopic regions of non-diamond formations on the diamond surface.…”
Section: Carbon Nanoclustersmentioning
confidence: 99%
“…The gas phase and plasma chemistry that underpins diamond CVD is by now quite well understood, through a combination of experiments (e.g. laser absorption and/or optical emission spectroscopy measurements [6][7][8][9] of the densities of selected gas phase species in their ground and/or excited states) and complementary plasma modelling. [6][7][8]10 Silicon is a common trace element in CVD-grown diamond, [11][12][13][14][15][16][17][18] arising either adventitiouslyby etching from the silicon substrate on which diamond is commonly grown or from silica windows or walls of the MW reactor during hydrogen termination and/or growth of diamondor by design if, for example, SiH4 is added to the process gas mixture.…”
Section: Introductionmentioning
confidence: 99%