Wet rapid thermal oxidation of vertical cavity surface emitting laser structures with pyrogenic steam generator

Gutt, T.; Chung, Hin Yiu Anthony; Feldmeyer, G.J.

doi:10.1109/rtp.2004.1441950

12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004.

DOI: 10.1109/rtp.2004.1441950

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Wet rapid thermal oxidation of vertical cavity surface emitting laser structures with pyrogenic steam generator

T. Gutt

Hin Yiu Anthony Chung²,

G.J. Feldmeyer³

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Wet rapid thermal oxidation of vertical cavity surface emitting laser structures with pyrogenic steam generator

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References 10 publications

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