Well Passivating and Highly Temperature Stable Aluminum Oxide Deposited by Atmospheric Pressure Chemical Vapor Deposition for PERC and PERT Solar Cell Concepts

Engelhardt, Josh; Gapp, Benjamin; Mutter, Florian; Hahn, Giso; Terheiden, Barbara

doi:10.4229/35theupvsec20182018-2bo.4.4

35th European Photovoltaic Solar Energy Conference and Exhibition; 390-394 2018

DOI: 10.4229/35theupvsec20182018-2bo.4.4

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Well Passivating and Highly Temperature Stable Aluminum Oxide Deposited by Atmospheric Pressure Chemical Vapor Deposition for PERC and PERT Solar Cell Concepts

Josh Engelhardt

Benjamin Gapp²,

Florian Mutter

et al.

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Well Passivating and Highly Temperature Stable Aluminum Oxide Deposited by Atmospheric Pressure Chemical Vapor Deposition for PERC and PERT Solar Cell Concepts

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