Well-conditioned multiple laser Mueller matrix ellipsometer

Abstract

We report on the design and performance test of a multiple laser Mueller matrix ellipsometer ͑MME͒. The MME is well conditioned due to the integration of the recently reported achromatic 132-deg compensators based on biprisms, in combination with high-quality GlanThompson polarizers. The system currently operates between 300 and 2700 nm, without the need to change any optical components except for the detector. Four lasers are employed as light sources ͑405, 532, 633, and 1570 nm͒ to test the performance in both reflection and transmission modes. Thus, the system is used to determine the Mueller matrices and associated optical constants of known optical systems: 1. optical rotatory power of D-glucose in solution, 2. reflection of a native oxide c-Si wafer, and 3. the properties of a liquid crystal spatial light modulator. The results show that the system matrices of the MME have condition numbers between the optimal ͱ 3 and 2 during operation, resulting in small experimental errors. To the best of our knowledge, there is no other MME reported with such good conditioning over a comparably wide spectral range.

Investigation of the optical properties of the liquid crystal-based devices via Mueller matrix formalism

“…In the first region (between p = 150 and p = 256), it is inferred from the curves' characteristics that because of the weakness of the applied voltage to the cell no significant change in the tilt as well as the azimuth angles of the molecules occurs. In this region, theoretical curves obtained from each scenario are in agreement with the experimental ones given in [31]. In the second region (between p = 100 and p = 150), the MM curves obtained from the third scenario, in which θ 0 changes between 45…”

Spectroscopic ellipsometry for active nano- and meta-materials

“…This trend may be even more reinforced by the development of still better systems and computing tools for data acquisition and treatment. Based on these developments, accurate characterization of structured surfaces based on the combination of Mueller matrix SE [176,177], with scatterometry [178], scattero metry SE [179], other nondestructive/noncontact characterization techniques [180], and numerical calculations [181] is to be foreseen.…”

Dynamic response of a fast near infra-red Mueller matrix ellipsometer

“…Fast Mueller matrix ellipsometers (MME) may have a wide range of applications in biology, medicine, and various monitoring and control systems, supplying additional polarimetric information in imaging and spectroscopic applications. A variety of high performance MMEs have been reported [1][2][3][4][5][6][7][8], but usually they are of considerable complexity and too slow for being used with CCD or CMOS stripe-spectrographs and imaging sensors. We are also considering the limit of non-reversible processes not covered by e.g.…”

“…However, this system does not allow for spectroscopic measurements, as the technique requires small spectral variations in the Mueller matrix of the sample. A rotating Fresnel prism retarder with a retardation of 132º across a wide spectral range (including UV) is probably the most optimal conditioned system around [5,11].…”

“…A key parameter in designing a Mueller matrix ellipsometer is to optimize the modulation or analyzer matrix of a polarization state generator (PSG) or a PSA in terms of their matrix condition numbers [5,[20][21]. In this respect, the Variable Liquid Crystal Retarder (VLCR) based Mueller matrix ellipsometer can be truly optimal, but only for a single wavelength at the time.…”