Weighting Ratio Correction Method For Depth Profiling Using Microsecond Pulsed Glow Discharge Mass Spectrometry

Abstract

Glow Discharge Mass Spectrometry (GDMS) is considered one of the most mature depth profiling techniques.In this paper, GDMS was employed to analyze a series of samples comprising a brass substrate coated with nickel films of varying thicknesses. We propose a novel method to accurately correct the elemental depths in the thin film analysis. The sputtering rates of the high-purity samples, representing the main element of the substrate and the main element of the film, are used to perform weighting ratio correction for each pulse. Leveraging the advantages of microsecond pulse glow discharge mass spectrometry, a more precise depth result can be achieved, laying the groundwork for subsequent accurate GDMS depth profiling.