2020
DOI: 10.1016/j.ceramint.2020.06.248
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Wear mechanisms identification using Kelvin probe force microscopy in TiN, ZrN and TiN/ZrN hard ceramic multilayers coatings

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Cited by 35 publications
(10 citation statements)
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“…The analysis of the SEM images of the transverse fractures of the coatings deposited on silicon wafers suggests that all investigated coatings have a dense, defect-free structure. Both ZrB 2 and Zr-B-N coatings have a higher density as compared to the industry-standard two-component coatings [46,47]. The SEM-derived growth rate of the coatings was 52 and 49 nm/min in case of deposition in Ar and Ar + N 2 , correspondingly.…”
Section: Resultsmentioning
confidence: 95%
“…The analysis of the SEM images of the transverse fractures of the coatings deposited on silicon wafers suggests that all investigated coatings have a dense, defect-free structure. Both ZrB 2 and Zr-B-N coatings have a higher density as compared to the industry-standard two-component coatings [46,47]. The SEM-derived growth rate of the coatings was 52 and 49 nm/min in case of deposition in Ar and Ar + N 2 , correspondingly.…”
Section: Resultsmentioning
confidence: 95%
“…This led to an increasing number of Ta atoms arriv- ing at the surface and replacing Ti atoms. At the same time, it can be seen that the splashing rate of Ta is significantly higher than Ti, which may be caused by the poisoning of Ti target [50].…”
Section: Microstructural Characterizationmentioning
confidence: 94%
“…For many decades monolayer nitrides, such as TiN, ZrN, and CrN, have been used for tribological applications. However, numerous studies have demonstrated that alternating deposition of binary nitride layers produces multilayer coatings with superior properties, i.e., TiN/ZrN, TiN/CrN, CrN/ZrN, MoN/CrN, and TiN/MoN [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 ]. That resulted in the widespread interest in multilayer architecture since it provides high hardness, wear resistance, and thermal stability.…”
Section: Introductionmentioning
confidence: 99%