2006
DOI: 10.4028/www.scientific.net/msf.532-533.157
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Wear Characteristics of ID Saw Blade in Silicon Ingot Slicing Process

Abstract: In this paper, the wear behavior of the ID (inner diameter) saw blade in the cutting process of silicon ingot was observed with SEM. Its wear mechanism was discussed and the relation between the blade wear and vibration, deflection was analyzed. The results show that the blade worn manners include flatted diamond, micro-fractured diamond, macro-fractured diamond, pulled-out hole, tortoise-fractured bond, and polished bond. In the abnormal working stage of a blade, however, the working surface of the blade is d… Show more

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