Wear Characteristics for Rod and Nozzle of Jetting Dispenser Driven by Dual Piezoelectric Actuators Under High Frequency with Phosphor-containing Liquid

Abstract

− An ultra-high precise ejection process is essential in a dispensing system for fabricating various precision parts such as a semiconductor, LED, and camera module. The size of such parts has been decreasing, which implies that a precise ejecting technique is required. A phosphor-containing liquid is ejected via a dispenser using dual piezoelectric actuators that are used for generating a high-speed dispensing mechanism. The rod and nozzle continuously contact in high speed to eject the liquid. However, the high-strength filler or phosphor in the liquid causes wear on the surfaces of the rod and nozzle during the dispensing process. As a result, the ejection reliability decreases as the wear on the surfaces increases. Therefore, it is necessary to estimate the wear characteristics of the rod and nozzle via an experiment and FE analysis. Reliability rests up to 1,000 cycles are conducted under relatively severe conditions. The flow rate and surfaces roughness of the rod and nozzle are measured in each ejection cycle. The surface images and wear volume are obtained before and after the tests and the ejection reliability is confirmed by measuring the flow rate of the liquid. The experimental results show that the ejection reliability is maintained up to 1,000k cycles; these results are validated by the simulation results.