Wear at microscopic scales and light loads for MEMS applications

Beerschwinger, U; Albrecht, T. R.; Mathieson, Derek; Reuben, Robert Lewis; Yang, S.J.; Taghizadeh, M. R.

doi:10.1016/0043-1648(95)90051-9

Cited by 19 publications

(10 citation statements)

References 13 publications

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“…Interestingly, Beerschwinger et al observed the opposite trend for the two materials, however, their measurements were recorded on a macro-scale rather than the micro/nano-scale results given here. 8 For the same applied load, the columnar caps were found to undergo greater wear than the equiaxed material. Varying wear rates can occur for different crystallographic planes due to differences in the atomic density, bond strength and slip plane orientation to the surface.…”

Section: Resultsmentioning

confidence: 98%

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A study of the surface chemistry, morphology and wear of silicon based MEMS

Cui

Baker

2004

Surface & Interface Analysis

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Polysilicon microelectromechanical systems (MEMS) are the subject of intense research activity. This paper reports on the surface chemistry, topography and nanowear properties of a MEMS test structure fabricated at Sandia National Laboratories, studied using XPS and atomic force microscopy (AFM). XPS C 1s and Si 2p spectra from the polysilicon components, silicon nitride substrate and a reference Si wafer are compared. The results confirm the presence of a self-assembled monolayer (SAM) on the MEMS surface. An island-like morphology is found on both polysilicon and silicon nitride surfaces of the MEMS. The islands take the form of caps, being up to 0.5 µm in diameter and 20 nm in height. It is concluded that a dual columnar and equiaxed microstructure develops during growth of these low pressure chemical vapour deposition (LPCVD) layers and the islands are caps to the columnar structures. A 35 µN load applied to the AFM diamond tip leads to a wear depth of 1.4 ± 0.13 nm and 2.1 ± 0.06 nm on the polysilicon and silicon nitride MEMS equiaxed surfaces, respectively. Under the same load, greater wear of the columnar caps on both surfaces is observed. The results suggest that the morphology present on the polysilicon surface will be worn flat during operation and will not adversely affect the wear properties of the polysilicon components.

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Section: Resultsmentioning

confidence: 98%

“…6 Beerschwinger et al have investigated the wear of singlecrystal silicon, polysilicon and silicon nitride coated silicon micro-structures against DLC. 8 Both silicon and polysilicon were found to exhibit reduced roughness and silicon nitride enhanced roughness after wear.…”

Section: Introductionmentioning

confidence: 98%

A study of the surface chemistry, morphology and wear of silicon based MEMS

Cui

Baker

2004

Surface & Interface Analysis

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“…Due to its high hardness, high electrical resistivity, low infrared (IR) absorption, transparency to visible light and good chemical inertness, diamond-like carbon (DLC) film has been researched for several applications, such as field emission displays [1], solid state devices [2], micro electro mechanical systems (MEMS) [3], and wear resistant coating [4]. Usually, these applications require mechanical and structural stability at harsh environment, such as a local high temperature annealing.…”

Section: Introductionmentioning

confidence: 99%

Friction force microscopy study of annealed diamond-like carbon film

Choi¹,

Joung²,

Heo³

et al. 2012

Materials Research Bulletin

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“…In certain applications, such as overcoats of the heads of magnetic media in hard disk and tape drive systems [13][14][15] and microelectromechanical systems, [16][17][18] this coating is required in an ultrathin condition. Development of these systems requires improved tribological performances of these thin films at nN load ranges.…”

Section: Introductionmentioning

confidence: 99%

An analysis of the nanotribological behaviour of Ti-containing hard carbon film

Roy¹,

Kvasnica²,

Eisenmenger-Stittner³

et al. 2005

Surface Engineering

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Diamondlike carbon (DLC) coatings are well known for their self-lubricating properties. Metalcontaining DLC films exhibit reduced internal stress, improved adhesion and reduced sensitivity to humidity. Furthermore, Ti-containing DLC coatings are compatible with biological environments. In view of this, the primary aim of the present work was to evaluate and analyse the friction force behaviour of Ti-containing hard carbon films. This work is primarily intended for application to microelectromechanical systems. In order to achieve the above mentioned objective, a hard carbon layer containing 6 at.-%Ti was deposited using an unbalanced magnetron sputter system on a silicon substrate. The deposition rate of the film was monitored by a quartz microbalance. Using a stylus profilometer, the thickness of the film was found to be 1 . 67 mm. The hardness and the elastic modulus of the film were determined using a nanoindenter. The hardness and the elastic modulus were determined to be 1 . 7 GPa and 17 . 7 GPa, respectively. The pull-off force, topography and friction force surface of the film were characterised with the use of an atomic force microscope. The pull-off force and the friction force were found to be 165 . 9 nN and 1 . 7 nN, respectively. The surface roughness R a was found to be 2 . 65 nm. The friction coefficient was evaluated as a ratio of the friction force and the summation of the pull-off force and the normal force. Using the topography, and lateral force image, the topography induced friction force surface and the adhesion induced friction force surface were evaluated. The influences of applied loads and scan speeds on friction coefficient and various friction force surfaces are described in detail.

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Wear at microscopic scales and light loads for MEMS applications

Cited by 19 publications

References 13 publications

A study of the surface chemistry, morphology and wear of silicon based MEMS

A study of the surface chemistry, morphology and wear of silicon based MEMS

Friction force microscopy study of annealed diamond-like carbon film

An analysis of the nanotribological behaviour of Ti-containing hard carbon film

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