Wdm power-level monitor with micro pyramid mirrors formed in arrayed optical waveguide

Total reflection mirrors fabricated on silica waveguides with focused ion beam

“…Introduction: Various approaches have been proposed for realising light-turning mirrors on silica planar lightwave circuits (PLCs) [1][2][3] to achieve planar photodiode integration for PLCs and other devices that need vertical optical coupling with PLCs, such as surface-emitting laser diodes, and optical interconnection between waveguide circuits. One is the formation of an angled structure (e.g.…”

“…One is the formation of an angled structure (e.g. gold-angled pits [1] or a resin slope [2]), which is placed in a vertical rectangular hole formed by reactive ion etching. The problem with this approach is that it results in a larger footprint (.100 Â 100 mm/mirror), which makes it unsuitable for the high-density integration of mirrors.…”