Wavelength-meter controlled cavity ring-down spectroscopy: high-sensitivity detection of trace moisture in N 2 at sub-ppb levels

Hashiguchi, Koji; Lisak, D.; Cygan, A.; Ciuryło, R.; Abe, Hisashi

doi:10.1016/j.sna.2016.02.016

Cited by 26 publications

(18 citation statements)

References 39 publications

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“…When these two capacitors are connected in parallel, the sensitivity is enhanced almost two-fold but the actual size remains unchanged. Also, this structure prevents the wastage of very useful dip-coated film on the opposite side of the substrate as reported previously in [7,9,14,16,17,[21][22][23]. The proposed method of sensitivity enhancement is easy, simple, and less time consuming.…”

Section: Introductionmentioning

confidence: 83%

“…Additionally, the size of the device remains unchanged and the costly sensing film which is deposited on the opposite side can be effectively utilized. This is because, when thin film is deposited on the gold-plated electrode by the dip coating method, the film deposited on the opposite side of the alumina substrate remains unused [8,[12][13][14][15][16][17][18][19][20][21][22]. This issue has not been addressed by previous reported work.…”

Section: Sensitivity Enhancement By Connecting Two Capacitors In Paramentioning

confidence: 99%

“…The steps of the fabrication process remain the same as in the case of a single sided capacitive trace moisture sensor [6][7][8][12][13][14][15][16][17][18][19][20][21][22]. Two gold electrodes are deposited on each side of an alumina substrate (19 mm × 19 mm × 1 mm) by the screen printing method.…”

Section: Procedures To Fabricate the Devicementioning

confidence: 99%

“…However, enhancement of the sensitivity is still required to make a prototype system for the possibility of commercial applications. In addition, there is a need to increase the dynamic range below 10 ppm [8,9,[12][13][14][15][16][17][18][19][20][21][22][23]. Continuous efforts are made by the researchers to fabricate highly porous nanostructures such as nanowire, nanotubes, and nanopores using different fabrication techniques.…”

Section: Introductionmentioning

confidence: 99%

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Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

2017

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Abstract:Measurement of moisture at ppm or ppb level is very difficult and the fabrication of such sensors at low cost is always challenging. High sensitivity is an important parameter for trace level (ppm) humidity sensors. Anelectronic detection circuit for interfacing the humidity sensor with high sensitivity requires a simple hardware circuit with few active devices. The recent trends for increasing the sensitivity include fabricating nanoporous film with a very large surface area. In the present work, the sensitivity of a parallel plate capacitive type sensor with metal oxide sensing film has been significantly improved with an aim to detect moisture from 3 to 100 ppm in the industrial process gases used to fabricate semiconductors and other sensitive electronic devices. The sensitivity has been increased by (i) fabricating a nanoporous film of aluminum oxide using the sol-gel method and (ii) increasing the cross-sectional area of a parallel plate capacitor. A novel double sided capacitive structure has been proposed where two capacitors have been fabricated-one on the top and one on the bottom side of a flat alumina substrate-and then the capacitors are connected in parallel. The structure has twice the sensitivity of a single sensor in the same ppm range but the size of the structure remains unchanged. The important characteristics of the sensors such as the sensitivity (S = ∆C ∆ppm × 100), the response time (t r ), and the recovery time (t c ) are determined and compared with a commercial SHAW, UKdew point meter. The fabricated double sided sensor has comparable sensitivity (S = 100%, t r (s) = 28, t c (s) = 40) with the commercial meter (S = 100.5%, t r (s) = 258) but has a faster response time. The proposed method of sensitivity enhancement is simple, and mass producible.

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Section: Introductionmentioning

confidence: 83%

Section: Sensitivity Enhancement By Connecting Two Capacitors In Paramentioning

confidence: 99%

Section: Procedures To Fabricate the Devicementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

2017

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“…Trace water in industrial gases must be monitored at many points during such processes to avoid undesirable loss of materials and energy. Appropriate detection methods for trace water in industrial gases are limited to cavity ring-down spectrometers (CRDS), 3,4 chilled-mirror hygrometers, 5 capacitive sensors, 6,7 and pulsed discharge helium ionization detector following chromatographic separation. 8 These methods are not perfect for this purpose in terms of a sensitivity, a response time, and an economy.…”

Section: Introductionmentioning

confidence: 99%

Ultra-sensitive Trace-Water Optical Sensor with In situ-synthesized Metal-Organic Framework in Glass Paper

Ohira

Nakamura

Endo³

et al. 2018

ANAL. SCI.

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Monitoring of trace water in industrial gases is strongly recommended because contaminants cause serious problems during use, especially in the semiconductor industry. An ultra-sensitive trace-water sensor was developed with an in situ-synthesized metal-organic framework as the sensing material. The sample gas is passed through the sensing membrane and efficiently and rapidly collected by the sensing material in the newly designed gas collection/detection cell. The sensing membrane, glass paper impregnated with copper 1,3,5-benzenetricarboxylate (Cu-BTC), is also newly developed. The amount and density of the sensing material in the sensing membrane must be well balanced to achieve rapid and sensitive responses. In the present study, Cu-BTC was synthesized in situ in glass paper. The developed system gave high sensing performances with a limit of detection (signal/noise ratio = 3) of 9 parts per billion by volume (ppbv) HO and a 90% response time of 86 s for 200 ppbv HO. The reproducibility of the responses within and between lots had relative standard deviations for 500 ppbv HO of 0.8% (n = 10) and 1.5% (n = 3), respectively. The long-term (2 weeks) stability was 7.3% for 400 ppbv HO and one-year continuous monitoring test showed the sensitivity change of <∼3% before and after the study. Furthermore, the system response was in good agreement with the response achieved in cavity ring-down spectroscopy. These performances are sufficient for monitoring trace water in industrial gases. The integrated system with light and gas transparent structure for gas collection/absorbance detection can also be used for other target gases, using specific metal-organic frameworks.

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Impurity Analysis of 5.5 N Nitrogen Gas and Its Impact on the Preparation of Class I Type Calibration Gas Mixtures

et al. 2023

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Knowledge of impurities in matrix gas is one of the critical requirements for the preparation of class I type calibration gas mixtures (primary reference gas mixtures, PRGMs) as per ISO 6142‐1. PRGMs are prepared gravimetrically using high‐purity component gas and high‐grade nitrogen, here 99.9995 % (5.5 N) as matrix gas. In this study, quantification of gaseous impurities such as moisture (H2O), methane (CH4), and carbon monoxide (CO) in 5.5 N nitrogen is performed using CRDS (cavity ring down spectroscopy). Carbon dioxide (CO2) and total hydrocarbons (THC) are analyzed using gas chromatography flame ionization detector (GC‐FID), while the determination of nitrogen dioxide (NO2) impurity is conducted colorimetrically using a UV‐Vis spectrophotometer. Total impurities in 5.5 N nitrogen are found to be (2945±21.5) ppb. The impact of utilizing this nitrogen is examined through the stability study of ambient range binary component gas mixtures of CH4 and CO in nitrogen and found that 5.5 N nitrogen can be used as matrix gas for preparing PRGMs of CH4 and CO. However, the component gas impurity present in nitrogen potentially affect the accuracy of gravimetrically prepared gas mixture.

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Wavelength-meter controlled cavity ring-down spectroscopy: high-sensitivity detection of trace moisture in N 2 at sub-ppb levels

Cited by 26 publications

References 39 publications

Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

Sensitivity Enhancement of a PPM Level Capacitive Moisture Sensor

Ultra-sensitive Trace-Water Optical Sensor with In situ-synthesized Metal-Organic Framework in Glass Paper

Impurity Analysis of 5.5 N Nitrogen Gas and Its Impact on the Preparation of Class I Type Calibration Gas Mixtures

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